DC power supply

Plasma excitation in the field of masterpiece, plasma excitation technology becomes the primary economic process. The plasma excited DC power series can be used for the single cathode system, the dual cathode system, and the magnetization treatment of the substrate.

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TruPlasma DC 3000 power supply series

• Compact structure and high reliability
• Advanced arc management techniques, leading to the residual energy of the arc reduction
• Low arc energy and fast recovery of the output
• Continuous processing improvement

Features:
• Broad power and frequency range
• Advanced arc management technology, extremely low arc residual energy
• Flexible arc management system
• Various user interface
• High reliability and long service life

Customer benefit:
• Applicable for kinds of techniques and usages
• Thin film deposition, and film uniformity
• Optimize the power parameters, to achieve high production and excellent performance
• Easily integrated into the system
• Maintenance cost reduction

New-type TruPlasma DC 3000 power supply series Water cooled DC power supply with compact structure. Due to the adoption of innovative CompensateLine arc management system, the series power supply can achieve the best coating quality, so it can replace the pulse power supply in magnetron sputtering process.

• The system greatly shortens the reaction time, and the residual arc energy reduced to a minimum rate
• Even in the high arc rate of the process, can ensure that the film in thin and homogeneous xondition

Features:
CompensateLine Technology enables the power supply to maintain performance in a high arc rate process
• Extremely low arc remnant energy, fast recovery
• Advanced DC sputtering applications
• To achieve high power output in a compact structure
• Full water cooled power supply scheme

Customer benefit:
• An expensive pulse AC power supply for a strong competitive program
• Significantly improve production efficiency
• High performance film quality
• Even greater than 40 kW power supply, and system integration also very convenient
• High system stability and low maintenance cost

TruPlasma DC 4000 power supply series

• Adjustable to the application of pulse DC power supply
• Arc management system with excellent performance
• Synchronous pulse mode

Features:
• Extremely low arc residual energy
• A short arc diagnosis time and rapid recovery of output
• Fast DSP control
• Synchronous pulse mode
• Broad tunable parameters: frequency and pulse data

Customer benifit:
• Ultra low substrate damage rate
• Greatly enhance the production efficiency
• To maintain a stable plasma and reduce the energy loss 
•  Process easy to optimize, and the user interface simple and easy to operate
• One equipment with multi-functions

Product Power supply Output Output Cooling method Power
[kW] Voltage Current [V]
  [V] [A]  
TruPlasma DC 3002 2* 800 5 Air cooling (±10%) 400
TruPlasma DC 3005 5* 800 12.5 Air cooling (±10%) 400
TruPlasma DC 3010 10* 800 25 Air cooling (±10%) 400
TruPlasma DC 3020 20* 800 50 Air cooling (±10%) 400
TruPlasma DC 3025 25* 800 62.5 Air cooling (±10%) 400
TruPlasma DC 3030 30* 800 75 Air cooling (±10%) 400
TruPlasma DC 3040 40* 800 100 Air cooling (±10%) 400
TruPlasma DC 3050 50* 800 125 Air cooling (±10%) 400
TruPlasma DC 3060 60* 800 150 Air cooling (±10%) 400
TruPlasma DC 3080 80* 800 187.5 Air cooling (±10%) 400
TruPlasma DC 3100 100* 800 225 Air cooling (±10%) 400
TruPlasma DC 3120 120* 800 300 Air cooling (±10%) 400
New-type TruPlasma DC 3020 series 20 1000 50 Water cooling  
New-type TruPlasma DC 3040 series 40 1000 100 Water cooling  
New-type TruPlasma DC 3060 series 60 1000 150 Water cooling  
TruPlasma DC 4005 5* 800 12.5 Air cooling (±10%) 400
TruPlasma DC 4010 10* 800 25 Air cooling (±10%) 400
TruPlasma DC 4020 20* 800 50 Air cooling (±10%) 400
TruPlasma DC 3000 power supply series is particularly suitable for the high requirements of plasma process, mainly used in the production of solar cells in the coating process, hard coating, decorative coating and optical coating, also in architectural glass coating with excellent performance. As equipped with a CompensateLine arc management system, the power series can help you to continuously improve the process results.
New-type DC TruPlasma 3000 power supply series is specially designed for the high-demanded magnetron sputtering process. Due to the advanced CombineLine electric arc management system, the DC power supply in series even when applied in the high hit rate of arc magnetron sputtering process, can obtain the best coating results. Therefore, it is especially suitable for solar cell coating technology and architectural glass coating process and these two kind characters of craft are equipped with good process safety and high yield.
For the high requirements of the plasma process, the TruPlasma 4000 DC power series be your best choice. Due to the wide range of load matching, this series can output all the power, so it is suitable for high-tech magnetron sputtering technology, standard DC plasma and pulse DC plasma technology. Like Hottinger's non pulsed DC power series, the series also has an arc management system with excellent performance.
Power supply parameter