DC power supply

DC power supply

Plasma excitation in the field of masterpiece, plasma excitation technology becomes the primary economic process. The plasma excited DC power series can be used for the single cathode system, the dual cathode system, and the magnetization treatment of the substrate.

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MF power supply

MF power supply

MF power supply, this device can ensure our professinal products with large coating area and high sputtering rate. Comparing with DC power supply in series, it has higher stability; and relating to the high frequency power supply, solutions are more economic. It can be a good choice for high dep

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RF power supply

RF power supply

For the micro process to macro products, the RF power series can make the processing technology with high stability, so it is often used in the production of micro components. The series power will help you succeed when the power supply scheme cannot be effectively implemented.  

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Arc power supply

Arc power supply

Hard coating with excellent performance by vacuum arc ion plating, obtained by vacuum arc ion plating.

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Bias power supply

Bias power supply

Every magnetron sputtering process can be supported by bias power supply: Bias TruPlasma 3000 / 4000 bias power series is a wide range of applications, advanced DC bias power supply. Whether for in materials processing, dry moment and bias of the film deposition applications or for PVD technology

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High-pulsed power supply

High-pulsed power supply

Excitation energy to ensure the coatings with high density plasma, the high power pulsed magnetron sputtering (HIPIMS)power can help you obtain good coating results.

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KT series high vacuum oil diffusion pump

KT series high vacuum oil diffusion pump

It is with valve, water-cooled baffle, pipes, mechanical pumps etc to make up a high vacuum pumping system, you can get working vacuum 10-2Pa ~ 10-4Pa, using liquid nitrogen cooling device, and bake them available to ultra-high vacuum (10-6Pa).

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European diffusion pump

European diffusion pump

Dedicated to the production, a large suction capacity can be maintained at high pressure and high load conditions, and can accommodate a large volume of gas in the common case of load change.

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EM Oil seal rotary vane pump

EM Oil seal rotary vane pump

EM series pumps are rugged mechanical seal pumps, pumping speed is 0.7 to 275 m3/hr (30 到 206 CFM). These pumps are compact structure, it's very quiet when used, with advanced lubrication circuits, high reliability, with a variety of accessories to meet specific application requirements.

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2X rotary-vane vacuum pump

2X rotary-vane vacuum pump

Two-level structure, its performance from the high-pressure stage and low level of two parts, which is connected to the suction port of the vacuum container or vacuum devices when running a large number of gas within the container suction and discharge.

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