Coatings prepared by vacuum multi-arc ion plating have achieved fruitful applications in the fields of cutting tools, molds, wear resistance and corrosion protection. AlCrN coatings are widely used in the tool industry due to their high production efficiency and good performance. Under the conditions of high temperature use, two kinds of dense oxides, Cr2O3 and Al2O3, can be formed, and the oxidation temperature can reach 900 degrees Celsius while maintaining high hardness, high wear resistance, high temperature oxidation resistance and good adhesion to the substrate. The advantages of the ion plating technology are that the target has a high ionization rate and a high deposition efficiency; the prepared coating has good adhesion to the substrate and is dense in structure.

Conventional ion cleaning techniques generally utilize Ar gas and high energy ions (heavy metal particles Ti and Cr plasma) to bombard the surface of the substrate at a relatively biased bias (800-1000 V) and have microscopic irregularities on the surface of the substrate. Enhance adhesion of the coating to the substrate. Different from the traditional ion bombardment process, Ti ion and electron are generated by cylindrical Ti target arc discharge. Under the traction of the shaft assisted anode, a large amount of ions move around the furnace cavity, and the Ar gas ion ionization in the furnace is excited to produce high density. The Ar ions bombard the surface of the substrate prior to deposition, thereby achieving a clearing of the substrate under low bias conditions. In this paper, the effects of different cleaning branches on the surface roughness of the substrate and the adhesion between the film bases are studied. The new bombardment cleaning technology is of great significance for the improvement of the multi-arc ion plating process.

The coatings prepared by the new ion cleaning and traditional bombardment cleaning were grouped into NC and TC. The film thickness of the prepared coating was about 4 microns.


The phase of the coating was detected by grazing incidence X-ray diffractometer (GIXRD). The surface of the sample after coating deposition was scanned by 3D topography. The bonding force of the film was detected by continuous loading method. The load is 0N, the termination load is 80N, the loading rate is 20N/min, and the scratch rate is 1mm/min. The friction coefficient of the coating under normal temperature condition is analyzed by a disk-pin type (BOD) friction and wear meter.