Diamond like carbon

Low friction coefficient

reduce friction loss

Vacuum application solution supplier
Home > Product > Diamond like carbon (DLC) coating machine
Diamond like carbon (DLC) coating machine

This series of machine has a variety of DLC coating deposition technology and modular coating machine design. According to the application requirements of customer products, it can filter cathode arc, closed field magnetron sputtering, PACVD and ion source technology modules for DLC deposition machine, which are suitable for a variety of scientific research, product development and mass production requirements. Advanced technology, convenient operation, less energy consumption, green environmental protection and other characteristics, widely used in machinery, electronics, optics, energy, decoration and other fields.

The DLC coating developed by HCVAC has good adhesion, high hardness and wear resistance, low friction coefficient and low surface roughness. It can deposit DLC coating on the surface of various metal and alloy tools and parts. The unique low temperature coating technology can also be used to deposit DLC coating on high temperature resistant materials such as plastics.

DLC coating has high hardness, excellent friction and wear resistance, high thermal conductivity, low dielectric constant, wide band gap, good optical permeability, excellent chemical inertness and biocompatibility. It has broad application prospects in aerospace, mechanical, electronic, optical, decorative appearance protection, biomedical and other fields. DLC coating is suitable for wear and sliding environment. It can reduce friction loss without any lubricating medium. It can be used in many fields such as automotive engine parts (fuel injection system, power transmission system), bearings, rollers, textile machinery, aerospace and other fields.

DLC coating (DLC coating) prepared by DLC coating machine has stable quality, good adhesion with substrate, good wear resistance, low friction coefficient and good corrosion resistance. It is widely used in engine parts, non-ferrous metal cutting tools, non-ferrous metal and stainless steel forming stamping die, sliding sealing parts, semiconductor industry mold, injection mold, textile industry and so on.

For different industries, and according to different requirements and materials of customers, we use different processes and preparation methods to design suitable DLC coating machine to meet the needs of customers.

DLC coating features:

1. It is a good self-lubricating coating for plastic processing;

2. The deposited film is 1-3 μ m and the hardness is 2000hv-2500hv;

3. It has excellent friction and wear properties, high temperature resistance of 350 ℃, and high resistance to adhesive and abrasive wear;

4. Rapid and predictable demoulding greatly improves quality and productivity, and is the first choice for PECVD coated plastics processing.


Main modules
Arc HiPIMS
The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures.
Benefits:
●High target utilisation result in low target costs
●High deposition rates
●Adjustable magnetic fields
●Short target changing times
●High plasma density
●Reduction of macro-particles
●Excellent coating adhesion
HiPIMS stands for High-Power Impulse Magnetron Sputtering.
Benefits:
●High ionisation rate (similar to arc)
●High power densities from 100 to 1000 W/cm2
●Very high plasma density
●Layer structures adjustable by plasma parameter settings
●Very smooth coatings
●Excellent coating adhesion
●Deposition of dense coatings at low substrate temperatures
Additional modules
Sputter Nitriding
In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate.
Benefits:
● A wide range of materials can be sputtered
● Diverse process variants available
● Smooth coatings
● Good coating adhesion on combination with power etching prozess AEGD
With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating.
Benefits:
● Optimisation of tool and component properties
● Substitution of expensive base materials
● Significantly longer lifetimes
● All PVD coatings can be applied
DLC ta-C
DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings.
Benefits:
● Excellent coating adhesion
● High wear resistance
● Low coefficient of friction
● Smooth coatings
ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced.
Benefits:
● For higher temperature environments than DLC
● Very high wear resistance
● Excellent coating adhesion
● Smooth coatings

Product Advantage.

HCSH series DLC coating machine includes the following key capabilities:
  • Compact

    Small footprint, easy to integrate into the factory

  • Uniformity

    Uniform deposition rate in the whole chamber

  • Simple

    Easy to operate and maintain

  • Modularization

    Flexible combination of various technologies

  • DLC

    Durable diamond-like carbon coating

  • Monitor

    Local or remote monitoring of coating process

Mode HCSH-400
Usable Plasma Coating area D400×H450mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 4~5h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×4 axis
Max Loading Capacity 200KG
Remark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
Mode HCSH-650
Usable Plasma Coating area D650×H750mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 5~8h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×8 axis
Max Loading Capacity 500KG
emark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
Mode HCSH-900
Usable Plasma Coating area D900×H1200mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 7~10h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump ×2
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×12 axis
Max Loading Capacity 500KG
emark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
Mode HCSH-1800
Usable Plasma Coating area D900×H1500mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 7~10h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump ×2
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×12 axis
Max Loading Capacity 500KG
emark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
  • Know More Technology ?

    More
  • Need More Equipment ?

    More
  • Industry Solutions ?

    More
Would you like to know more?
Please contact us

E-mail: info@hcvac.com

Online Consultation

Submit