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Application principle of cryogenic trapping pump in vacuum coating machine

2021-06-02

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The vacuum coating machine has a component called cryogenic trapping pump. If the general professional vacuum coating personnel don't mention this component, many people almost don't know such a component. So what role does cryogenic trapping pump play in the vacuum coating machine? The following is vacuum series to introduce the application principle of the cryogenic trapping pump of the vacuum coating machine, hoping to help everyone:


In the high vacuum environment, there are some residual gases. Because the molecular weight of water molecules is smaller than that of oxygen, nitrogen and other main air components, neither oil diffusion pump nor molecular pump can pump them out quickly and effectively, so they accumulate more and more, and finally become residual gas accounting for more than 65%~95% of residual gas;

Meanwhile, due to the inevitable evaporation of pump oil during the use of the vacuum pump, a small amount of oil vapor will enter the vacuum system. Due to the existence of water vapor and oil vapor, the vacuum system can't reach the vacuum degree required by customers quickly, which leads to longer vacuumizing time and lower production efficiency. The higher the required vacuum degree, the higher the environmental humidity, and the more obvious the influence.

At the same time, the existence of water vapor and oil vapor will lead to the decrease of film firmness, failure of multilayer coating and uneven color.

Under certain conditions, water vapor will ionize to generate oxygen, which will oxidize the target and cause the color of the coating to change. The higher the environmental humidity, the higher the temperature, the higher the required vacuum degree and the greater the influence. Therefore, water vapor and oil vapor are the main harmful gases in the field of vacuum coating machine and high vacuum obtaining.

The function of cryogenic trapping pump is to trap residual gas, which effectively solves the problem of difficult extraction and slow speed in high vacuum state, and improves the use efficiency of vacuum system. The working principle of cryogenic pump is: place a refrigeration coil which can reach below -120 in the vacuum chamber or the pump port of oil diffusion pump, and quickly trap the residual gas of vacuum system through the low temperature condensation effect on its surface. Thereby greatly shortening the vacuumizing time (which can shorten the pumping time by 60-90%) and obtaining a clean vacuum environment (which can improve the vacuum degree by half an order of magnitude to 10 Torr and 10 Pa).

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