Routine cleaning and maintenance of optical vacuum coating machines is very important. Proper daily cleaning and maintenance can reduce daily production costs, reduce failure rates, improve efficiency and other advantages. Below, the editor of Huicheng Vacuum will introduce in detail the cleaning and maintenance methods of optical vacuum coating machines. I hope it can help everyone:

Maintenance of optical coating machine
(1) Regularly replace diffusion pump oil
The diffusion pump oil is used for a period of time, about two months (two shifts). Due to the long-term high temperature environment, although the diffusion pump is started at a higher vacuum, there are still residual oxygen and other components that cause it to react with the diffusion pump oil. The diffusion pump Oil may also crack at high temperatures, causing its quality to deteriorate and prolonging the pumping time. It should be replaced when we think the time has extended too much.
(2) Vacuum pump
Mechanical pump oil and maintenance pump oil will change in quality after two months of use. Because the oil may draw in moisture, impurities and other reasons, the viscosity of the used oil will become worse and the vacuum will decrease, so it needs to be replaced. If it is new equipment, it should be replaced within the first half month of use, because during the running-in period, the oil contains more running-in iron powder, which will aggravate wear.
(3) Cleanliness and hygiene
Regularly clean the equipment and its surrounding environment, keep the inside and outside of the equipment clean, organize the environment around the equipment in order, and create a good working environment to ensure safety.

Cleaning of optical coating machine
After the equipment was used for one week (third shift), the plating material was not only plated on the surface of the workpiece, but also had no directionality. , absorbing a large amount of gas and causing the vacuum coating equipment to pump air slower and slower. At this time, the working room and lining should be cleaned. If the disassembled parts are not necessary, they can be polished with sandpaper. The lining can be soaked in a hydrofluoric acid aqueous solution. The ratio of hydrofluoric acid to water depends on the length of soaking time and The principle is not to damage the lining board. The lining must be dried before installation. Before drying, the lining should be wiped dry as much as possible. After cleaning the work frame and other parts with sandpaper, all dust in the vacuum chamber needs to be cleaned. This can be done with a vacuum cleaner. When finally installing the liner, both the vacuum chamber and the liner need to be wiped clean with alcohol. Due to the use of electron guns and ion sources to assist coating, cleaning may be difficult. Sandblasting and other methods can be used for cleaning.