The pvd coating machine operates the coating in a vacuum state. In the early stage of coating, the pvd coating machine uses mechanical pumps, Roots pumps, diffusion pumps and other accessories to evacuate, in order to achieve the vacuum conditions required for workpiece coating. So since it is an accessory of the pvd coating machine, daily repair and maintenance are definitely indispensable. Below, Huicheng Vacuum will introduce in detail how to maintain the diffusion pump of the pvd coating machine on a daily basis.

1. The cooling water must be kept open during the operation of the diffusion pump. After stopping heating, the cooling water must be turned off only after the pump working fluid has been completely cooled.
2. When the diffusion pump stops working, the vacuum should be maintained inside the pump to prevent the pump oil from deteriorating.
3. The gas to be pumped should be dry, non-corrosive and dust-free.
4. If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil contamination and corrosion of various parts, and the remaining water in the cooling water jacket should be blown away. The room temperature maintained at the site should be between 10-40 degrees Celsius.
The performance of the diffusion pump will gradually deteriorate after long-term operation and should be checked regularly. For example: if the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; the parts and pump cavity are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer. . After processing, assemble in sequence, keeping the pump core and pump bottom vertical and concentric with the pump chamber, and the nozzle clearances at all levels should be adjusted according to the original requirements.
5. After the water has evaporated, install the pump core, add new diffusion pump oil, reinstall the body, connect the water pipes, install the electric stove, and then restart the machine.
7. Pay attention to leak detection before restarting the machine. The method is: start the maintenance pump, close the door, and after a few minutes, observe the vacuum degree and check whether the sealing ring is missing at the connection or the sealing ring is crushed. Heating can only be done after eliminating the risk of air leakage, otherwise the diffusion pump oil will burn out and cannot enter working condition.
pvd coating machine accessories maintenance is indispensable. If maintenance is done well, enterprises can reduce costs and increase efficiency, reduce failure rates, improve efficiency, and reduce unnecessary emergencies.