Diffusion pump is a kind of high vacuum obtaining equipment, which is limited to -5pa pump, with high pumping speed and high efficiency, and can pump air at fast speed. It is generally used in equipment with high vacuum plating and high pumping speed, and is an important component of vacuum coating machine. Most of them are large-scale equipment, so the cost will be relatively high. Therefore, most merchants attach great importance to the maintenance and maintenance of diffusion pump of vacuum coating machine. The following is an series to introduce in detail how to maintain and maintain the diffusion pump:

First, the cooling water must be unblocked during the working process of the diffusion pump, and the cooling water can only be turned off after the pump working fluid has been completely cooled after stopping heating.

Second, when the diffusion pump stops working, the pump should be kept in a vacuum state to avoid deterioration of pump oil.

Third, the pumped gas should be dry, non-corrosive and dust-free. Fourthly, if the diffusion pump is not used for the time being, it should be kept in a vacuum state during storage, so as to avoid pump oil pollution and corrosion of various parts and blow off the remaining water in the cooling water jacket. Keep the room temperature of the site between 10-40 degrees Celsius.

Fifthly, the performance of diffusion pump will gradually deteriorate after long-term operation, so it should be checked regularly. For example, if the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; Parts and pump cavity are cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100℃ or blown dry with electric hair dryer. After treatment, assemble in sequence, keep the pump core vertical to the pump bottom and concentric with the pump cavity, and adjust the clearance of nozzles at all levels according to the original requirements.

Sixthly, after the water evaporates and dries, install the pump core, add new diffusion pump oil, install it back to the machine body, connect the water pipe, install the electric furnace plate, and then restart the machine.

Seventh, pay attention to leak detection before restarting the vacuum coating machine. The method is: start the maintenance pump, close the gate, observe the vacuum degree after several minutes, and check whether the sealing rubber ring is missing or the sealing ring is crushed at the joint. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the oil of diffusion pump will burn out and cannot enter the working state.