The vast majority of optical vacuum coating machines use electron gun coating technology, which has high cost, large investment and large equipment volume. Therefore, attention is paid to the cleaning and maintenance of optical vacuum coating machines. The following is a vacuum series to introduce the maintenance and cleaning methods of optical vacuum coating machines in detail, hoping to help everyone:

After using the optical vacuum coating machine for one week (three shifts), the coating material is not only coated on the surface of the workpiece, but also coated on the lining plate in the working room because of its non-orientation, and the coating thickness is thicker and thicker. The film thickness of this layer is loose due to the organization and winding, which absorbs a large amount of gas and causes the vacuum coating equipment to pump air more and more slowly. At this time, the studio and lining board should be cleaned. If the parts are removed unnecessarily, they can be polished with sandpaper. The lining board can be soaked in hydrofluoric acid aqueous solution. The ratio of hydrofluoric acid to water depends on the length of soaking time and does not damage the lining board. The liner must be dried for moisture before installation. Before drying, the moisture of the liner should be wiped dry as much as possible. After the working frame and other parts are cleaned with sandpaper, all the dust in the vacuum chamber should be cleaned, which can be sucked by vacuum cleaner. At last, when installing the liner, the vacuum chamber and liner should be wiped clean with alcohol. Cleaning is difficult due to the use of electron gun and ion source to assist coating, so sand blasting can be used for cleaning.

Optical vacuum coating machine needs to change the diffusion pump oil regularly, and the diffusion pump oil is used for a period of time, about two months (two shifts). In long-term high temperature environment, although the diffusion pump is started at high vacuum, oxygen and other components still remain to react with the diffusion pump oil, and the diffusion pump oil may crack at high temperature, which will degrade its quality and prolong the pumping time. When we think that the time has been extended too much, it should be replaced. When the mechanical pump oil is used for two months, the oil quality will change. Because the oil may suck in moisture, impurities and other reasons, the viscosity of the used oil becomes worse and the vacuum drops, so it needs to be replaced. If it is new equipment, it should be replaced in the first half month of use, because during the running-in period, the oil contains more running-in iron powder, which will aggravate the wear.

Optical vacuum coating machine needs to keep the equipment and its surrounding environment clean regularly, keep the inside and outside of the equipment clean, organize the surrounding environment of the equipment and have a good working environment to ensure safety.