The diffusion pump is the main component of the pvd coating machine, which belongs to the high vacuum pump, so that the machine can operate in the best state. It is very important to maintain and maintain the diffusion pump of the pvd coating machine. Today, I will share with you the maintenance and maintenance knowledge of the diffusion pump of the pvd coating machine.

1. The cooling water must be unblocked during the working process of the diffusion pump. After the heating is stopped, the cooling water must be turned off after the working fluid of the pump has been completely cooled.
2. When the diffusion pump stops working, the inside of the pump should be kept in a vacuum state to avoid the deterioration of the pump oil.
3. The gas to be pumped should be dry, non-corrosive and dust-free.
4. If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil pollution and corrosion of various parts and blow out the remaining water in the cooling water jacket. Keep the room temperature of the venue between 10-40 degrees Celsius
5. The performance of the diffusion pump will gradually deteriorate after long-term operation, and should be checked regularly. Such as: whether the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; parts and pump chambers are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer . After the treatment, assemble them in order, keep the pump core and the pump bottom vertical and concentric with the pump cavity, and adjust the gaps of the nozzles at all levels according to the original requirements.
6. After the water has evaporated and dried, install the pump core, add new diffusion pump oil, and put it back into the body, connect the water pipe, and install the electric hob, and then it can be restarted.
7. Before restarting the machine, pay attention to leak detection. The method is: start the maintenance pump, close the door of the vacuum chamber, and after a few minutes, observe whether the vacuum degree is 6*10 0 Pa, otherwise, conduct a leak detection, check whether the sealing rubber ring is missing at the connection, or the sealing ring is crushed. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn out and cannot enter the working state.
Diffusion pump is one of the pumps in the pumping system of the pvd coating machine. To use the diffusion pump to pump vacuum, it must be assisted by a mechanical pump, and it is also necessary to pump a low vacuum first by the Roots pump. I won't introduce them one by one, and I'll introduce them to you next time.