Vacuum coating machine mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc.
1. What is a vacuum coating machine?
Vacuum coating machine mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many others. The main idea is to divide it into two types: evaporation and sputtering. The one that needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the same vacuum chamber.
Evaporation coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, and settles on the surface of the substrate to form a thin film through the film formation process (scattered point-island structure-vagus structure-layered growth). For sputtering coatings, it can be simply understood as bombarding the target with electrons or high-energy lasers, and sputtering the surface components in the form of atomic groups or ions, and finally depositing them on the surface of the substrate. Evaporation coating equipment for the plated product map + the plated product map process, and finally form a thin film.
2、the use of vacuum coating machine steps，
Operation of the electric control cabinet
1) Turn on the water pump and air source
2) Turn on the main power
3) Turn on and maintain the power supply of the pump and vacuum gauge, and the position of the vacuum gauge is V1, wait for the value to be less than 10, and then enter the next step. It takes about 5 minutes.
4) Turn on the mechanical pump, pre-pump, turn on the power of the turbo molecular pump, start it, change the switch of the vacuum gauge to the V2 position, and pump it until it is less than 2, which takes about 20 minutes.
5) After observing that the reading of the turbo molecular pump reaches 250, turn off the vacuum pump, open the front engine and the high valve and continue to vacuumize. After the vacuum reaches a certain level, the high vacuum meter on the right can be opened to observe the vacuum degree. The electron gun power can only be turned on after the vacuum reaches 2×10-3.
3. Shutdown sequence
1) Turn off the high vacuum gauge and the molecular pump.
2) When the molecular pump display reaches 50, turn off the high valve, the front stage, and the mechanical pump in sequence, and it will take about 40 minutes during this period.
3) When it is below 50, turn off the maintenance pump again.
4、the scope of application of vacuum coating machine
1) Architectural hardware: bathroom hardware (such as faucets), door locks, door handles, bathroom, door locks, hardware hinges, furniture, etc.
2) Watchmaking: It can be used for the coating of case and strap, and crystal products.
3) Other small hardware: leather hardware, stainless steel tableware, glasses frames, knives, molds, etc.
4) Large workpieces: automobile wheels, stainless steel plates, signboards, sculptures, etc.
5) Stainless steel tubes and plates (various types of surfaces)
6) Furniture, lamps, hotel utensils
7) Locks, handles, bathroom hardware, golf heads, stainless steel tableware, blood vessels and other hardware products are plated with super-hard decorative film.
8) Glasses, jewelry and other accessories are plated with super wear-resistant decorative (gold and silver) nano-film, nano-film and nano-laminated film.
5、maintenance and maintenance methods
1) After the
vacuum coating machine completes more than 200 coating procedures, the studio should be cleaned once
The method is: repeatedly scrub the inner wall of the vacuum chamber with a saturated solution of caustic soda (NaOH), (note that the human skin cannot directly contact the caustic soda solution to avoid burns) The purpose is to make the plated film material aluminum (AL) react with NaOH, and the film after the reaction The layer falls off and hydrogen gas is released. Then clean the vacuum chamber with clean water and clean the dirt inside the fine extraction valve with a cloth dipped in gasoline.
2) When the rough pump (slide valve pump, rotary vane pump) works continuously for one month (half of the rainy season), it needs to be replaced with new oil
The method is: unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds, so that the old oil in the pump is completely discharged. Unscrew the oil-returning bolt and add new oil to the rated amount (observed by the oil sight glass). For more than half a year of continuous use, the oil cover should be opened when changing the oil, and the dirt in the box should be wiped off with a cloth.
3) If the diffusion pump has been used continuously for more than 6 months, the pumping speed is obviously slowed down, or the operation is improper, fill it with the atmosphere, remove the connecting water pipe, remove the electric cooker, unscrew the first-level nozzle, and first use gasoline to clean the pump cavity and the pump. Wash the gallbladder once, then wash it with washing powder mixed with water, and then thoroughly clean it with water. After the water evaporates and dry, install the pump gallbladder, add new diffusion pump oil, and put it back into the body, connect the water pipe, and install the electric furnace. disk, you can reboot. Before restarting, pay attention to leak detection. The method is: start the maintenance pump, close the door, and after a few minutes, observe whether the vacuum degree of the diffusion pump reaches 6X10 Pa, otherwise it is necessary to perform leak detection. Check whether the sealing ring is installed at the joint, or the sealing ring is crushed. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.
