The metal parts vacuum coating machine coating process, the most commonly used ion coating technology and magnetron sputtering coating technology, the following introduces the multi-arc ion coating technology operation process introduction, I hope to help you:

1. Metal parts decorative film plating process
The more mature coating technologies include arc ion plating, magnetron sputtering ion plating and composite ion plating. The following is an introduction to a representative typical coating process selected from various coating technologies. The method of arc ion plating is to electroplate bright chrome on brass or to plate ticn film on nickel watch case.

Adopt small arc source coating machine and pulse bias power supply;
(1) The workpiece is cleaned, put on the shelf, and put into the furnace
The workpiece must undergo three processes of ultrasonic cleaning, pickling and rinsing before entering the furnace.

The first is to put the metal cleaning agent prepared according to the requirements in the ultrasonic cleaning tank, and use ultrasonic waves for degreasing and cleaning. After cleaning, pickling is carried out, which can neutralize the residual lye during ultrasonic cleaning, and can also play the role of activation treatment. Then rinse to remove the acid completely, must use deionized purified water or distilled water when rinsing. After three washes, it is immediately dried, the temperature is generally controlled at about 100 ° C, and the time is about 1 hour. You can also put it in the oven immediately after it is air-dried.

(2) Preparations before coating
①Clean the vacuum coating chamber. Clean the vacuum coating chamber with a vacuum cleaner. After many times of coating, the inner lining of the vacuum coating chamber needs to be cleaned regularly, usually once every two weeks.
②Check the arc evaporation source. Before working, it is necessary to ensure that the arc evaporation source is installed correctly, the insulation is good, the arc ignition needle is flexibly controlled, the process is suitable, and it can just touch the cathode surface.
③ Check the insulation of the workpiece holder. The insulation between the workpiece frame and the ground must be good, and the contact points between the negative bias power supply and the workpiece frame must be in good contact.
After the above work has ensured that there is no problem, the door of the vacuum coating chamber can be closed for air extraction and coating.

(3) Vacuuming
Vacuum to 6.6 x 10-3pa. Start with rough pumping, pump from the atmosphere to about 5pa, and use oil diffusion pump for fine pumping. During roughing, it can be baked and heated to 150°C. With the increase of the temperature of the coating chamber, the deflation of the wall will reduce the vacuum degree, and then rise again, and the coating work can be carried out when the temperature rises back to 6.6 x 10-3pa.

(4) Bombardment cleaning
①Argon ion bombardment cleaning
Vacuum degree: The vacuum degree of high-purity argon gas (99.999%) is maintained at 2-3pa. Bombardment voltage: 800 ~ 1000v. Bombardment time: 10min.
At this moment, a glow discharge occurs in the vacuum coating chamber, and the argon ions generated by the discharge strike the surface of the workpiece with high energy, sputtering the gas, impurities and atoms adsorbed on the surface of the workpiece, exposing the fresh surface of the material.

②Titanium bombardment
Vacuum degree: keep the vacuum degree at 2 x 10-2pa with high-purity argon gas. Pulse bias: 400 ~ 500v, duty cycle 20%. Arc current: 60～80a, alternately ignite the arc evaporation source, and each arc evaporation source ignites for 1～2min.

(5) Coating
①Titanium plating
Vacuum degree: Pass through high-purity argon gas, and keep the vacuum degree at 2 x 10-2pa. Pulse bias: 200 ~ 300v, duty cycle 50%. Arc current: 60～80a, ignite all arc sources, time 2～3min.

②Plating ticn
Vacuum degree: Keep the vacuum degree at (3～8) x 10-1pa by using high-purity nitrogen gas, and then gradually increase the c2h2 gas. Variety. The ratio of the two gases, n2 and c2h2, can be controlled to achieve a predetermined chromaticity.

Arc current: 50～70a. Pulse bias: 100～150v, duty cycle 60%～80%. Deposition temperature: around 200°C. Coating time: 10~20min, film thickness 0.2~0.5μm.

(6) Cooling
After the coating process is over, first turn off the arc power supply and bias power supply, then turn off the gas source and stop the turntable. When the workpiece is cooled to 80-100 ℃ in the vacuum coating chamber, the atmosphere is filled into the coating chamber, and the workpiece is taken out.

The above is the general process of the multi-arc ion vacuum coating machine coating process, which is widely used and the most common.