Evaporation vacuum coating machine is divided into resistance evaporation coating machine, electron beam evaporation coating machine, induction evaporation coating machine according to coating technology. However, it is still very unfamiliar to outsiders. The following is a vacuum editor to introduce the coating principle of the resistance evaporation vacuum coating machine in detail. I hope it can help you:
The vacuum evaporation coating method is to heat the raw material to be formed into a thin film in the evaporation container in a vacuum chamber, so that its atoms or molecules are vaporized and escaped from the surface to form a steam flow, which is incident on the surface of a solid (called a substrate or substrate), A method of condensation to form solid films.
Use high melting point metals such as tantalum, molybdenum, tungsten, etc., to make an evaporation source of appropriate shape, put the material to be evaporated on it, let the airflow pass through, and directly heat and evaporate the material to be evaporated, or put the material to be evaporated into alumina and oxidize it. Indirect heating evaporation is carried out in crucibles such as beryllium, which is the resistance heating evaporation method.
The coating machine that uses resistance heaters to heat and evaporate has a simple structure, low cost, and reliable use. It can be used for evaporation coating of materials with a low melting point, especially for mass production that does not require high coating quality. So far, The process of resistive heating evaporation is still widely used in the production of aluminized mirrors.
The disadvantage of the resistance heating method of the resistance evaporation
vacuum coating machine is that the maximum temperature that the heating can reach is limited, and the life of the heater is also short. In recent years, in order to improve the life of heaters, conductive ceramic materials synthesized with boron nitride with longer life have been used as heaters at home and abroad. According to a Japanese patent report, the crucible can be made of a material composed of 20% to 30% boron nitride and a refractory material that can be melted with it, and the surface is coated with a layer of 62% to 82% zirconium, and the rest It is a zirconium silicon alloy material.