The coating field of vacuum coating machine is a large branch of vacuum applications. It has a very wide range of applications in optics, flexible materials, physical and chemical instruments, decoration, machinery and surface treatment technology. With the development of the times, the development of science and technology, life With the continuous improvement of the level, the surface treatment technology of the vacuum coating machine is even more important.
Vacuum coating technology, simply understood, is to use evaporation, sputtering and subsequent condensation methods to coat metal films or coatings on objects such as metal, glass, ceramics, semiconductors and plastic parts in a vacuum environment. Compared with the traditional coating method, the vacuum coating application belongs to a kind of dry coating, and its main methods include the following:
Vacuum evaporation
The principle is that under vacuum conditions, the material is heated with an evaporator to vaporize or sublime, and the vaporized ion current is directly directed to the substrate, and the solid film is deposited on the substrate.
sputter coating
Sputtering coating is to connect 2000V high voltage to the cathode under vacuum conditions to stimulate glow discharge. Positively charged argon ions strike the cathode to eject atoms. The sputtered atoms are deposited on the substrate through an inert atmosphere to form a film layer. .
Ion coating
That is, the vacuum ion coating that the dry screw vacuum pump manufacturer has introduced. It is developed on the basis of the above two vacuum coating technologies, so it has the process characteristics of both. Under vacuum conditions, the working gas or the vaporized material (film material) is partially ionized by gas discharge, and the vaporized material or its reactant is deposited on the surface of the substrate under ion bombardment. During the formation of the film, the substrate is always bombarded by high-energy particles and is very clean.