In the vacuum coating machine, what needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the same vacuum chamber. Evaporation coating is generally to heat the target material so that the surface components are evaporated in the form of atomic groups or ions, and settle on the surface of the substrate to form a thin film through the film formation process. This coating technology is the evaporation coating technology.
For sputtering coating, the vacuum coating machine can be simply understood as bombarding the target with electrons or high-energy lasers, and sputtering the surface components in the form of atomic groups or ions, and finally deposited on the surface of the substrate, going through the film-forming process, Finally, a thin film is formed, and this coating technology is called magnetron sputtering coating technology.
The vacuum coating machine is composed of vacuum furnace body, vacuum pump, control cabinet, vacuum gauge, cooling system and other components. The vacuum donkey body can choose a double-layer water-cooled structure made of stainless steel, carbon steel or their combination. The target material is determined according to the specific film layer to be plated, what film layer to use, what target material to use, or to rush into the relevant sub-gas to achieve the required film layer.
Different specifications and types of vacuum coating machines are selected according to process requirements. The types include resistance evaporation vacuum coating equipment, electron beam evaporation vacuum coating equipment, magnetron sputtering vacuum coating equipment, ion plating vacuum coating equipment, and magnetron reactive sputtering vacuum coating equipment. , hollow cathode ion plating and multi-arc ion plating, etc. The operation forms of the fixture include rotation, revolution and revolution + rotation. The user can put forward corresponding requirements according to the size and shape of the piece. The speed range and rotation accuracy of the rotation are: ordinary adjustable and variable frequency speed regulation.