The vacuum target chamber structure of the vacuum coating machine prototype device consists of a diameter and thickness spherical shell with multiple windows, a vacuum target chamber support frame, terminal optical components, high-precision target support adjustment components, high-precision target positioning monitors, and connection It is composed of various physical parameter diagnostic measuring instruments on the spherical shell of the target chamber and an auxiliary support frame connected with the terminal optical assembly.

       Vacuum target chamber transition disc; vacuum target chamber adjustment component; 1- vacuum target chamber supporting steel frame. Among them, the supporting legs and the auxiliary supporting frame of the terminal optical system are adopted. In order to avoid too many local modes, they are replaced by rigid entities when modeling; to simplify the model, uniform density entities are used for terminal optical components, etc., so that simplification has little effect on the results. In the model for analyzing the roundness error of the target chamber, only one special case is considered, that is, the maximum roundness error. The target chamber is an ellipsoid with the short axis in the direction and the long axis in the direction. The coordinate system is defined as: the origin of the coordinate is at the center of the target chamber, the positive direction from west longitude to east longitude, and the positive direction from south latitude to north latitude. The positive direction is determined by the right-hand rule, and the axis is perpendicular to the flange of the equator. surface.
       Calculation and analysis results In the static calculation of the target chamber, before and after vacuuming, the maximum translational displacement of the target chamber is not much different, indicating that the deformation of the target chamber in static state is mainly affected by its own weight; auxiliary support is added to the terminal optical system Later, the maximum translational displacement of the target chamber becomes slightly smaller; in the case of a special roundness error considered by the author, the maximum translational displacement of the target chamber becomes slightly smaller. The static analysis and calculation results of the target chamber. The actual measurement results. The measurement method takes the intersection of the center lines of the two pairs of orthogonal flanges on the equatorial plane of the target chamber as the center of the target chamber, and the target ball is placed there. Place a mirror at the feature point of interest, point the laser beam to the feature point, and use a goniometer to observe the relative position change of the point during the process of repeatedly vacuuming and deflating the target chamber to obtain the feature of interest Deformation data of the point.
     Guangdong Huicheng Vacuum has been specializing in the manufacture of various vacuum coating application equipment for many years, and has continuously introduced advanced vacuum coating machines from abroad. For many years, it has been committed to the research and development and production of vacuum coating machines, and has continuously manufactured vacuum plating equipment that meets market needs with the latest technology. Provide customers with customized process solutions and machines.