Electron beam evaporation vacuum coating machine is the most widely used in the new industrial electronic product industry. This coating technology has many advantages, but also some disadvantages. Because the characteristics of the evaporative coating machine play a huge role in the production of thin films, the production of thin films is mainly generated by the heating of the electron beam in the coating machine. Under high vacuum, the filament of the electron gun emits thermionic electrons after heating, which is accelerated by the accelerating anode to obtain a large kinetic energy to bombard the evaporating material, convert the kinetic energy into heat to heat and vaporize the evaporating material, and realize electron beam evaporation coating. The electron beam evaporation source consists of a hot cathode that emits electrons, an electron accelerating electrode, and a coating material as an anode. The energy of the electron beam evaporation source can be highly concentrated, so that the coating material locally reaches a high temperature and evaporates. By adjusting the power of the electron beam, the evaporation rate of the coating material can be easily controlled, especially for the high melting point and high purity metal and compound materials.
1. The advantages of electron beam heating evaporation vacuum coating machine
①The electron beam heating method in the coating machine is compared with the traditional resistance heating method. Electron beam heating will produce a higher flux density, which is beneficial for the evaporation of high melting point materials, and can also increase the rate of evaporation to a certain extent.
②The evaporation coating machine will put the raw materials that need to be evaporated into the water-cooled copper crucible when it is working, so that the material can be prevented from being polluted, and the film with relatively high purity can be produced.
③ The kinetic energy of the particles evaporated by the electron beam is relatively large, which will be beneficial to the precision and bonding force of the film.
2. Disadvantages of electron beam heating evaporation vacuum coating machine coating
①The overall structure of the electron beam evaporation coating machine is relatively complex, and the price is relatively high compared to other coating equipment.
②When the
vacuum coating machine is working, if the density of the vapor near the evaporation source is relatively high, it will cause some interaction between the electron beam and the vapor particles, which will affect the flux of electrons, making the electrons Flux is lost or off track. At the same time you may also induce excitation and ionization of the vapor and residual gas, thereby affecting the quality of the entire film.