Diffusion pump is a kind of high vacuum obtaining equipment. The limit is -5pa grade pump. It has high pumping speed and high efficiency. It can pump air quickly. It is generally used in equipment with high vacuum plating and high pumping speed requirements. It is a pvd coating machine. Important parts, vacuum coating machines use diffusion pumps to evacuate, and most of them are large-scale equipment, so the cost will be relatively high. Therefore, most businesses attach great importance to the maintenance and maintenance of diffusion pumps of pvd coating machines. The vacuum editor will introduce in detail how to maintain and maintain the diffusion pump:

First: the cooling water must be unblocked during the working process of the diffusion pump. After the heating is stopped, the cooling water must be turned off after the working fluid of the pump has been completely cooled.
Second: When the diffusion pump stops working, the pump should be kept in a vacuum state to avoid deterioration of the pump oil.
Third: the gas to be pumped should be dry, non-corrosive and dust-free gas.
Fourth: If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil pollution and corrosion of various parts and blow out the remaining water in the cooling water jacket. The room temperature to keep the venue should be between 10-40 degrees Celsius.
Fifth: the performance of the diffusion pump will gradually deteriorate after long-term work, and it should be checked regularly. Such as: whether the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; parts and pump chambers are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer . After the treatment, assemble them in order, keep the pump core and the pump bottom vertical and concentric with the pump cavity, and adjust the gaps of the nozzles at all levels according to the original requirements.
Sixth: After the water has evaporated and dried, install the pump core, add new diffusion pump oil, and put it back into the body, connect the water pipe, and install the electric hob, then it can be restarted.
Seventh: Before reopening the pvd coating machine, pay attention to leak detection. The method is: start the maintenance pump, close the door, observe the vacuum degree after a few minutes, and check whether the sealing ring is missing at the connection, or the sealing ring is crushed. Heating can only be done after eliminating the hidden danger of air leakage, otherwise the diffusion pump oil will burn out and cannot enter the working state.