High pvd coating machine, coating machine is currently the most widely used equipment for making vacuum conditions. Its related components and components: mechanical pump, booster pump, oil diffusion pump, condensate pump, vacuum measurement system. I will introduce the components and working principles of each part in detail below.

      1. Vacuum main body - vacuum chamber
      According to the different requirements of the processed products, the size of the vacuum chamber is also different. At present, the most widely used diameters are 1.3M, 0.9M, 1.5M, 1.8M, etc. The cavity is made of stainless steel, which requires no rust and solidity. Each part of the vacuum chamber is provided with connecting valves for connecting each pumping pump.
      2. Auxiliary exhaust system
      This exhaust system is composed of "diffusion pump + mechanical pump + roots pump + cryogenic cold trap + polycold"
      The exhaust process is as follows: the mechanical pump first evacuates the vacuum chamber to a low vacuum state of less than 2.0*10-2PA, which provides the premise for the subsequent vacuuming of the diffusion pump, and then when the diffusion pump evacuates the vacuum chamber, the mechanical pump cooperates with oil diffusion The pumps are connected in series to complete the pumping action in this way.
      The exhaust system is an important part of the vacuum system of the coating machine, which is mainly composed of a mechanical pump, a booster pump (mainly introducing the Roots pump), and an oil diffusion pump.
      Mechanical pump: also known as the backing pump, the mechanical pump is the most widely used low vacuum pump. It uses oil to maintain the sealing effect and relies on mechanical methods to continuously change the volume of the suction cavity in the pump to make the pumped container. The volume of the gas inside expands continuously to obtain a vacuum.
      There are many types of mechanical pumps, commonly used are spool valve type (this is mainly used in large equipment), piston reciprocating type, fixed vane type and rotary vane type (this is currently the most widely used, this article mainly introduces) four types.
      Mechanical pumps of pvd coating machines are often used to remove dry air, but cannot remove gases with high oxygen content, explosive and corrosive gases. Mechanical pumps are generally used to remove permanent gases. There is no good effect, so it can't pump out moisture. The main parts of the rotary vane pump are the stator, rotor, shrapnel, etc. The rotor is inside the stator but has a different mandrel from the stator, like two inscribed circles. It is ensured that the shrapnel is tightly attached to the inner wall of the stator.