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What are the characteristics of magnetron sputtering vacuum coating machine

2022-08-06

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Magnetron sputtering vacuum coating machine is widely used in home appliances, clocks, lamps, arts and crafts, toys, car lamp reflectors, mobile phone button shells and instrumentation, plastics, glass, ceramics, tiles and other surface decorative coating and industrial Functional coating of molds. The so-called "sputtering" is the phenomenon of bombarding an object with energetic particles (usually gas positive ions), thereby causing the surface atoms of the object to escape from the parent body. Grove discovered this phenomenon in the laboratory as early as 1982. The magnetron sputtering target adopts a static electromagnetic field, the magnetic field is curved, and the uniform electric field and logarithmic electric field are respectively used for the flat target and the coaxial cylindrical target. Under the action of the electric field, the electrons collide with argon atoms in the process of accelerating and flying to the substrate. If the electrons have sufficient energy (about 30ev), they will ionize Ar+ and generate electrons, and the electrons will fly to the substrate. Ar+ is in the electric field. Under the action, it accelerates to the cathode (sputtering target) and bombards the target surface with high energy, so that the target sputters.


Magnetron sputtering vacuum coating machine


 Magnetron sputtering vacuum coating machine magnetron sputtering methods are generally divided into DC sputtering, radio frequency sputtering, pulse sputtering, and intermediate frequency sputtering. These four sputtering methods have their own advantages!
      Then the magnetron sputtering vacuum coating machine has the following characteristics:
      1. The film thickness has good controllability and repeatability, and can reliably coat the film of the desired thickness, and the sputtering coating can obtain a film with a uniform thickness on a larger surface;
      2. The adhesion between the film and the substrate is strong, and some high-energy sputtered atoms produce different degrees of implantation, forming a pseudo-diffusion layer on the substrate in which the sputtered atoms and the substrate atoms are fused with each other;
      3. Thin films of special materials can be prepared, and the film layer can be sputtered with different materials to prepare mixed films and compound films, and can also be sputtered into TiN imitation gold films;
      4. The purity of the film layer is high, and the components of the crucible heater material will not be mixed into the sputtering film layer.
Magnetron sputtering vacuum coating machine Magnetron sputtering technology is the most widely used coating technology in the vacuum industry. It is almost omnipotent. Whenever you hear about coating technology, you will think of magnetron sputtering technology.
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