When newcomers first enter the factory, the premise is to pass a series of professional training, pvd coating machine operation procedures, pvd coating machine leak detection, maintenance problems, and safety hazards must pass training, so that Cui Jinxin coating engineer can save time, I can quickly get started and operate the machine. Today, Huicheng Vacuum will introduce to you how the operation process of the pvd coating machine is. I hope it can help you:

First: First of all, I will introduce the operation of the electric control cabinet. Each equipment operation has a process, and no step can be missed. (1) First turn on the water pump and air source. (2) Then turn on the main power supply. (3) Turn on the power supply of the maintenance pump and the vacuum gauge, and the position of the vacuum gauge is V1. Wait for the value to be less than 10, and then enter the next step. It takes about 5 minutes. (4) Turn on the mechanical pump, pre-pump, turn on the power of the turbo molecular pump, start it, change the switch of the vacuum gauge to the V2 position, and pump it to less than 2, it takes about 20 minutes. (5) After observing that the reading of the turbomolecular pump reaches 250, turn off the vacuum pump, open the front engine and the high valve and continue to vacuumize. After the vacuum reaches a certain level, the high vacuum gauge on the right can be opened to observe the vacuum degree. The electron gun power can only be turned on after the vacuum reaches 2×10-3.
Second: Operation of the DEF-6B electron gun power supply cabinet, (1) Turn on the main power supply. (2) Turn on the power supply of electron gun control I and electron gun control II at the same time: press the power supply of electron gun control I, the delay switch, the delay, power and protection lights will be on, and the delay and protection lights will be off after three minutes, if the back door is not closed properly or the water flow relay If there is a fault, the protection light will always be on. (3) Turn on the high voltage, the high voltage will reach more than 10KV, the beam current can be adjusted to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1 and 1.7.
 Third: shutdown sequence. (1) Turn off the high vacuum gauge and the molecular pump. (2) When the molecular pump display reaches 50, turn off the high valve, the front stage, and the mechanical pump in sequence. This period takes about 40 minutes. (3) When it is below 50, turn off the maintenance pump again.
The above are the operation steps of the pvd coating machine. When newcomers are ready to operate the machine, they must keep in mind the operation process of the equipment, and do not miss any links. After a long time of operation, they will be comfortable by themselves, and will gradually become a professional. engineer who operates coating equipment.