In my country's vacuum coating industry, more applications are currently focused on decoration, and the preparation equipment, process and application research of mechanical functional films that can effectively improve the service life of key components are still far behind foreign advanced levels. At the same time, decorative plating is gradually developing towards the dual function of wear resistance and decoration. The previous ion vacuum coating machine has shown the problem that it cannot meet the requirements of high-end decorative plating. The successful research and development of this technology will break the passive situation that the domestic high-performance mechanical function wear-resistant and anti-friction film is completely dependent on foreign technology; it is a very good demonstration for improving the technical level of my country's equipment manufacturing industry and the technological development of vacuum ion plating. . In addition, applying the prepared wear-resistant and friction-reducing film to other key components plays a very good role in saving energy and improving efficiency, and can replace part of the original electroplating process, which has a good effect on environmental protection.

At present, most of the mechanically functional hard films (especially the films used for cutting tools) in the world use cathodic arc deposition technology. Application performance; especially domestically manufactured cathodic arc deposition equipment particle problem is particularly serious. The introduction of magnetic filtration technology on the basis of this technology can solve the problem of particles deposited on the surface, but the deposition efficiency is only about 1/10 of the original, and the deposition area is small, so that the production cycle is long, the manufacturing cost is high, and it is not suitable for mass coating. production applications. The surface of the film prepared by the magnetron sputtering technology is smooth and delicate, the deposition rate is moderate, and the film can be uniformly deposited in a large area. However, the magnetron sputtering technology also has a low ionization rate (generally 10%), and the prepared film is inferior to the film prepared by the cathodic arc technology in terms of hardness, wear resistance and bonding force; (such as TiN, TiO2), due to the low ionization rate and poor reactivity of metal particles, reactive gas must be introduced in excess, causing poisoning (chemical reaction) of the magnetron target surface, causing a series of avalanches such as a sharp reduction in the evaporation rate. As a result, the magnetron sputtering reactive coating has instability and uncontrollability.
 
        Therefore, there are multi-functional ion vacuum coating machines on the market now. Through a large number of tests and industrial applications, this project has drawn the following conclusions:
      (1) The designed multi-functional ion coating machine with multiple coating technologies is successful, and the comprehensive performance of the established coating system is in a leading position in China.
      (2) The equipment can prepare diamond-like film and metal nitrogen (or carbon) compound multi-layer film with smooth and dense surface, smooth and delicate surface, and excellent performance in large area and low cost.
      (3) The use of a special multi-layer gradient intermediate transition layer and doping technology reduces the internal stress, improves the film/substrate bonding force, and is conducive to the growth of the film layer (up to 6mm thick).
      (4) The prepared DLC film has excellent comprehensive properties: hardness>20GPa (up to 37.25GPa), adjustable thickness (up to 6mm thick), film/base bonding force>50N (up to 100N), friction coefficient <0.2 , the film is smooth and delicate.
      (5) The developed matrix/Cr/CrN/CrTiAlN/CrTiAlCN/CrTiC/DLC multi-layer wear-resistant and heat-resistant self-lubricating coating has good comprehensive properties: the hardness is up to 28.7GPa, the thickness is adjustable from 1-4mm, and the film The /base bonding force is greater than 70N, and the friction coefficient is less than 0.2.
      (6) The developed wear-resistant and anti-friction film has been successfully applied to a variety of high-precision molds and precision key components. The application results show that the surface strengthening effect of the film layer is remarkable, which can greatly improve the product quality and service life.