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When choosing a vacuum coating machine, you should pay attention to those aspects

2022-08-24

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When many customers purchase pvd coating machines, their considerations are not very comprehensive. As professionals, we usually introduce them to customers, and consider the aspects that he has not considered for customers in advance. The following is a vacuum editor for everyone. Introduce in detail what aspects should be considered when purchasing equipment. The following points need to be paid attention to when purchasing a pvd coating machine:


      1. Manual and automatic selection. According to the characteristics of the equipment, you can choose manual, semi-automatic, fully automatic or a combination of control methods.
       2. The choice of the inflation method of the pvd coating machine. The inflation method can choose the mass flowmeter, the float flowmeter + the needle valve and the corresponding inflation valve, and the multi-channel inflation pipeline and the corresponding flow parameters can be selected.
       3. Selection of plating method, choose plating method and form according to process requirements, such as resistance evaporation (tungsten wire, molybdenum boat, graphite boat) magnetron source (coaxial cylindrical magnetron source, cylindrical planar magnetron source , rectangular plane magnetron source, etc.) with target material and size multi-arc source (Ф60, Ф80 diameter target, pneumatic, electric arc ignition, etc.), vacuum measurement can choose digital intelligent vacuum gauge and its high-quality measuring gauge Tubes, and other measuring instruments, such as automatic pressure controllers, etc. The film thickness measurement can choose a square resistance measuring instrument, a transmittance meter, etc.
       Fourth, the working mode of the pvd coating machine fixture, the fixture operation mode includes rotation, revolution and revolution + rotation mode, the user can put forward corresponding requirements according to the size and shape of the substrate, the rotation speed range and rotation accuracy: ordinary adjustable and variable frequency speed regulation Wait.
       5. Select the type of pvd coating machine, and choose different specifications and types of coating equipment according to process requirements. The types include resistance evaporation, electron beam evaporation, magnetron sputtering, magnetron reactive sputtering, ion plating, hollow cathode ion plating, Multi-arc ion plating, etc.
       6. Vacuum system, the vacuum system is composed of mechanical pump, diffusion pump, oil booster pump, augmentation pump, Roots pump, crucible molecular pump, etc. and various pneumatic, manual, electric valves, pipelines, etc. that match them. .
       Seven, the selection of barbecue instrument, according to the structure to be baked, propose the baking temperature, material and the corresponding instrument measurement required.
       8. Choose a complete alarm system for the alarm system to provide sound and light alarms for abnormal conditions such as vacuum chamber body, diffusion pump phase failure, water shortage, air pressure, overvoltage and overcurrent of power load.
       Nine, choose the furnace body material, the furnace body can choose a double-layer water-cooled structure made of stainless steel, carbon steel or their combination.
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