Many new employees think they are very professional when talking about the optical pvd coating machine when they first joined the company, but when asked about the basic skill requirements of the optical coating machine, few people knew about it. Today, we will introduce it in detail and list the basic requirements of the optical coating machine, hoping to help everyone.
1. The structural form of vacuum pipes and static sealing parts (flanges, sealing rings, etc.) in the equipment shall comply with the provisions of GB/T6070
2. A vacuum measuring gauge shall be installed on the low vacuum and high vacuum pipes and the pvd coating machine to measure the vacuum degree of each part. When the electric field is found to interfere with the measurement, an electric field shielding device shall be installed at the measuring port.
3. If the main pump used by the equipment is a diffusion pump, an oil vapor trap shall be installed at the air inlet side of the pump.
4. The coating room of the equipment shall be equipped with an observation window and a baffle device. The observation window shall be able to observe the working conditions of the sedimentary source and other key parts.
5. The design of ion plating deposition source should try to improve the ionization rate in the coating process, improve the utilization rate of coating materials, reasonably match the power of deposition source, and reasonably arrange the position of deposition source in the vacuum chamber.
6. The heating device shall be arranged reasonably, and the general heater structure layout shall make the temperature rise of the workpiece to be plated uniform.
7. The work-piece frame shall be insulated from the vacuum chamber body, and the design of the work-piece frame shall make the film of the work-piece uniform.
8. The ion coating equipment shall generally have a workpiece negative bias voltage and ion bombardment power supply, and the ion bombardment power supply shall have an abnormal discharge suppression device to maintain stable operation.
9. The insulation resistance value of each part of the vacuum chamber connected to different potentials:
1) Ambient temperature: 10-30oC
2) Relative humidity: no more than 75%
3) Cooling water inlet temperature: not higher than 25oC
4) Cooling water quality: urban tap water or water of equivalent quality
5) Power supply: 380V three-phase 50Hz or 220V single-phase 50Hz (depending on the needs of the electrical appliances used); Voltage fluctuation range: 342-399V or 198-231V; Frequency fluctuation range: 49-51Hz.
6) The pressure, temperature and consumption of compressed air, liquid nitrogen, cold water, hot water, etc. required by the equipment shall be specified in the product manual.
7) The surrounding environment of the equipment shall be clean and the air shall be clean, and there shall be no dust or gas that may cause corrosion on the surface of electrical appliances and other metal parts or cause conduction between metals.
The basic technical requirements of the
optical pvd coating machine are listed above. To be engaged in the vacuum coating industry, professionals must master the basic knowledge, so that they can complete the work more smoothly in the later period.