The method of safe operation of the magnetron sputtering vacuum coater is the basic skill that every engineer who enters the vacuum coater must master. Only by mastering the safe operation method and standard operation process of the vacuum coater can the personal safety of the magnetron sputtering vacuum coater engineer be fully guaranteed and dangerous operation is prohibited. So how to operate the vacuum coater safely? Let's summarize it into a vacuum editor to introduce it in detail:

 

Under the normal operation of the machine tool, when starting the magnetron sputtering vacuum coating machine, you must first open the water pipe, and always pay attention to the working water pressure. At the same time, in case of ion bombardment and evaporation, special attention should be paid to high-voltage wire connectors, which should not be contacted to prevent electric shock. The electron gun in the coating is on the outer bell of aluminum. It is better to use lead glass observation window glass, and wear glasses to observe lead glass to prevent X-ray from damaging human body. For the deposition of multi-layer dielectric film coating, the vacuum coating machine should be equipped with ventilation and dust removal equipment to remove harmful dust in time. Keep flammable and toxic substances in case of fire poisoning.
The pickling device shall be carried out on the ventilation device and rubber gloves shall be worn. The acid or alkali in the parts into the cleaning tank shall be gently cleaned, and the vacuum coating machine shall be free of collision and splash. In addition, common pickling tanks and basins should be covered. Finally, the water should be cut off after the work is completed.
Safety specifications: the use of vacuum system, vacuum system, high-temperature vacuum pump oil filling system, and magnetron sputtering vacuum coating machine are slightly at risk of explosion and combustion. Therefore, the installation and operation specifications in the process of operation must be strictly followed. Be careful. The heat pump experience is dangerous to burn people, and the rotating parts may be dangerous to hurt people, so pay attention to the booster pump and diffusion pump that are not accessible during the production process, The preoperative shields of slide valve pump and Roots pump must be complete and inaccessible. The equipment winding system of the magnetron sputtering vacuum coater may be dangerous to hurt people in the process of operation. Therefore, the magnetron sputtering vacuum coater can mask and clean the film at a speed not too fast, not more than 30 meters per minute, and not more than 10 meters per minute.