Compared with the pvd coating machine, everyone has doubts. Today we are going to discuss the design of the vacuum chamber of the pvd coating machine. If you are interested in learning about it, you can look at the following content with Baorui Titanium.

Vacuum deposition technology is to use physical or chemical methods to obtain the required film body on the surface of an object under vacuum conditions. vacuum deposition technology can be divided into evaporation coating, sputtering coating, ion plating, beam deposition and molecular beam epitaxy according to different methods. The coating equipment used in this analysis is Magnetron sputtering coating.

The vacuum chamber is one of the main components of vacuum equipment. The design of the vacuum chamber of pvd coating machine mainly considers the sealing and reliability. The structure must be reasonable. The material production of vacuum equipment is carried out in the vacuum chamber. The impact of materials on the vacuum degree should be small, and the design should not be sloppy. Some problems should be noted.

The pvd coating machine using Magnetron sputtering generally adopts a cylinder main structure, which should ensure rapid evacuation in structure, because the air bag will slowly deflate