The operating steps of the pvd vacuum coating machine must be mastered by every staff who is new to the vacuum coating industry. The industry in this field is naturally inseparable from daily contact with the coating machine. As we all know, the PVD vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE Molecular-beam epitaxy, PLD laser sputtering deposition and so on. The main idea is to divide it into two types: evaporation and sputtering. The operation of the vacuum coating equipment should refer to the equipment manual and the label instructions under each knob on the vacuum coating machine, as well as the instrument panel pointer display. The general situation is as follows:
1. Check whether the operation control switches of the vacuum coating equipment are in the "off" position.
2. Turn on the main power switch and power on the vacuum coating equipment.
3. Pull out the low-pressure valve. After opening the charging valve and hearing no sound of airflow, activate the bell jar valve to raise the bell jar.
4. Install and fix the tungsten spiral heating element. Fix the PVDF film and aluminum cover plate on the rotating disc. Thread the aluminum wire into the spiral heater. Clean all parts of the bell cover to ensure that there are no impurities or dirt.
5. Lower the bell cover.
6. Start the
pvd vacuum coating machine and vacuum the mechanical pump.
7. Turn on the power supply of the composite vacuum gauge (model of the composite vacuum gauge: Fzh-1A).
When the pointer in the low vacuum gauge "2" moves clockwise again to 6.7Pa, the low pressure valve is pushed in. At this point, the left knob "1" rotates to point to the measurement position of section 1.
9. Turn on cooling water for the vacuum coating machine, start the diffusion pump, and heat for 40 minutes.
10. Pull out the low-pressure valve. Repeat the ⑦ action program: Turn the bottom left knob "1" to point to the measurement position of section 2. The pointer in the low vacuum gauge "2" moves clockwise. When the pointer moves to 6.7Pa, open the high-pressure valve (the valve stem rotates clockwise).