The pvd coating machine mainly refers to a kind of coating that needs to be carried out under a high vacuum, including many kinds, including vacuum ion evaporation, magnetron sputtering, MBE Molecular-beam epitaxy, PLD laser sputtering deposition and many others. The main idea is to divide it into two types: evaporation and sputtering. The operation of the pvd coating machine should refer to the equipment manual, the label instructions under each knob on the pvd coating machine, and the instrument panel pointer display. The general situation is as follows:
1. Check whether the operation control switches of the vacuum coating machine are in the "off" position.
2. Turn on the main power switch and power on the vacuum coating equipment.
3. Pull out the low-pressure valve. After opening the charging valve and hearing no sound of airflow, activate the bell jar valve to raise the bell jar.
4. Install and fix the tungsten spiral heating element. Fix the PVDF film and aluminum cover plate on the rotating disc. Thread the aluminum wire into the spiral heater. Clean all parts of the bell cover to ensure that there are no impurities or dirt.
5. Lower the bell cover.
6. Start the pvd coating equipment and vacuum the mechanical pump.
7. Turn on the power supply of the composite vacuum gauge (model of the composite vacuum gauge: Fzh-1A).
When the pointer in the low vacuum gauge "2" moves clockwise again to 6.7Pa, the low pressure valve is pushed in. At this point, the left knob "1" rotates to point to the measurement position of section 1.
9. Turn on cooling water for the
pvd coating machine, start the diffusion pump, and heat for 40 minutes.
10. Pull out the low-pressure valve. Repeat the ⑦ action program: Turn the bottom left knob "1" to point to the measurement position of section 2. The pointer in the low vacuum gauge "2" moves clockwise. When the pointer moves to 6.7Pa, open the high-pressure valve (the valve stem rotates clockwise).