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Improvement and Improvement of Oxygen Resistance in Multi arc Ion Pvd Coating Machine

2023-06-20

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Multi arc ion pvd coating machine is a method of using arc discharge to directly evaporate metal on a solid cathode target material. The evaporated material is the ions of cathode material emitted from the cathode arc shining point, which are then deposited on the surface of the substrate to form a thin film.


pvd coating machine


In order to meet the requirements of coating and various multi-layer thin films and composite compound thin films, multifunctional multi arc ion coating has become the current research and development direction and hotspot. The multi arc ion coating adopts advanced technology of twin targets, overcoming the inherent drawbacks of target poisoning and sparking in DC sputtering, and improving the oxidation and corrosion resistance of the plated parts.

A cylindrical multi arc target is installed in the center of the multi arc ion plating film, and the target material is titanium or zirconium. It not only maintains the characteristics of high ionization rate and deposition rate of multi arc technology, but also effectively reduces the defects of "liquid droplets" that are difficult to avoid during the deposition process of small plane multi arc targets, thereby preparing low porosity metal films or composite special films; Twin planar magnetic control targets are installed around the perimeter, with targets made of aluminum or silicon; At home and abroad, multiple small flat multi arc evaporation sources are installed around the perimeter, with targets made of chromium or nickel, which can be plated with multi-layer metal films and multi-layer composite films.

pvd coating machine composite ion coating equipment, due to its various forms of coating devices and evaporation sources and emission targets of different materials, can work independently and simultaneously, producing both pure metal films and metal compound films or composite material films; It can prepare both single-layer thin films and multi-layer composite films, with extremely wide applications.
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