pvd coating machine vacuum generator is a new, efficient, clean, economical and small vacuum component that uses positive pressure air source to generate negative pressure. It becomes very easy and convenient to obtain negative pressure in places with negative pressure. Vacuum generators are widely used in the fields of machinery, electronics, packaging, printing, plastics and robots in industrial automation. The traditional use of vacuum generators is to cooperate with vacuum suction cups to carry out adsorption and handling of various materials, especially suitable for adsorption of fragile, Soft, thin non-ferrous, non-metallic materials or spherical objects. In this type of application, a common feature is that the required pumping volume is small, the vacuum degree is not high, and it is intermittent work. The author believes that the analysis and research on the suction mechanism of the vacuum generator and the factors affecting its working performance have practical significance that cannot be ignored for the design and selection of positive and negative pressure gas circuits.
Working principle of pvd coating machine generator
The working principle of the pvd coating machine generator is to use the nozzle to spray compressed air at high speed, and form a jet at the outlet of the nozzle to generate entrainment flow. Under the action of entrainment, the air around the outlet of the nozzle is continuously sucked Let the pressure in the adsorption chamber drop below the atmospheric pressure to form a certain degree of vacuum.
The basic parameters of the Roots vacuum pump unit used in the
pvd coating machine refer to the pumping rate, equipped power, ultimate pressure, etc. of the unit. The pumping rate is the nominal pumping rate of the main pumps that make up each unit, and the allocated power of the unit is the sum of the allocated powers of all the single pumps that make up the unit. The basic parameters of various units are shown in the table below.
Serial number Unit category Front type Ultimate pressure Pa Pumping rate L/s Equipped power kw
1 Two-stage Roots liquid ring vacuum unit Single-stage water ring vacuum pump ≤300 The nominal pumping rate of the main pumps that make up each unit The sum of the equipped power of all the single pumps that make up the unit
Two-stage water ring vacuum pump ≤300
Single stage oil ring vacuum pump ≤100
Two-stage oil ring vacuum pump ≤80
2 Two-stage Roots slide valve (rotary vane) vacuum unit Single-stage slide valve vacuum pump ≤1*10-1
Single-stage rotary vane vacuum pump ≤1*10-1
Two-stage slide valve vacuum pump ≤2*10-2
Two-stage rotary vane vacuum pump ≤2*10-2
3 Two-stage Roots reciprocating vacuum unit Reciprocating vacuum pump ≤300
4 Two-stage air-cooled Roots vacuum unit Air-cooled Roots vacuum pump ≤3000
5 Two-stage Roots water ring atmospheric jet pump unit Single-stage water ring vacuum pump ≤40
Two-stage water ring vacuum pump ≤40
6 Three-stage Roots liquid ring vacuum unit Single-stage liquid ring vacuum pump ≤40
Two-stage water ring vacuum pump ≤40
Single stage oil ring vacuum pump ≤2
Two-stage oil ring vacuum pump ≤1
7 Three-stage Roots slide valve (rotary vane) vacuum unit Single-stage slide valve vacuum pump ≤2*10-2
Single-stage rotary vane vacuum pump ≤2*10-2
Two-stage slide valve vacuum pump ≤1*10-2
Two-stage rotary vane vacuum pump ≤1*10-2
8 Three-stage Roots reciprocating vacuum unit Reciprocating vacuum vacuum pump ≤40
9 Three-stage air-cooled Roots vacuum unit Air-cooled Roots vacuum pump ≤100
10 Three-stage Roots water ring atmospheric jet pump unit Single-stage water ring vacuum pump ≤2
Two-stage water ring vacuum pump ≤2
11 Four-stage Roots liquid ring vacuum unit Single-stage water ring vacuum pump ≤1
Two-stage water ring vacuum pump ≤1
Single-stage oil ring vacuum pump ≤5*10-1
Bipolar oil ring vacuum pump ≤5*10-1
12 Four-stage Roots reciprocating vacuum unit Reciprocating vacuum pump ≤2
13 Four-stage Roots slide valve (rotary vane) vacuum unit Single-stage slide valve vacuum pump ≤1*10-2
Single-stage rotary vane vacuum pump ≤1*10-2
Two-stage slide valve vacuum pump ≤8*10-3
Two-stage rotary vane vacuum pump ≤8*10-3
*Ultimate pressure refers to the ultimate partial pressure of non-condensable gas