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Leak detection techniques for PVD coating vacuum coating machine

2023-07-26

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It is believed that peers have their own methods for leak detection of PVD coating vacuum coating machine. Dongguan Huicheng Vacuum Technology Co., Ltd. has been engaged in the research and development and manufacturing of various vacuum coating equipment for many years, so how to study the leak detection of PVD coating vacuum coating machine, Huicheng vacuum experts said:


PVD coating vacuum coating machine


Firstly, for PVD coating containers or devices in the manufacturing process, it is best to use the PVD coating bubble leak detection method. The PVD coating bubble leak detection method is to fill the tested piece with a certain pressure of leakage gas and place it in the liquid. The PVD coating gas enters the surrounding liquid through the leakage hole to form bubbles. The location where the PVD coating bubbles are formed is the location of the leakage hole. Based on the bubble formation rate, bubble size, and the physical properties of the gas D liquid used, the PVD coating can roughly estimate the leakage rate of the leakage hole.

PVD coating cover method: PVD coating uses an ethylene plastic bag (cover) to cover the entire device, and PVD coating then fills the bag with helium gas, which is a method of immersing the entire vacuum container in helium for leak detection. PVD coating pressure rise method is a method that, after sufficient air extraction, closes the main valve, coarse extraction valve, and leakage valve, and uses the B-A ionization vacuum gauge to measure the changes in pressure rise inside the device to determine whether there is any leakage.

The PVD coating vacuum coating machine coating is the sum of the pressure rise caused by air leakage and the pressure rise caused by material deflation, which ultimately results in a linear increase proportional to time. When the PVD coating curve shows the above state, it indicates that the device is leaking air. The PVD coating vacuum coating machine has no leakage, only material bleeding, and the curve should show a saturated state; When there is no material deflation and only air leakage, it is initially a straight line proportional to time.
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