Diffusion pump is a kind of high vacuum equipment, the limit is -5pa level pump, the pumping speed is high, the efficiency is high, and it can pump air quickly. It is generally used in the equipment with high vacuum plating and high pumping speed requirements. It is a pvd coating machine. Important parts, the pvd coating machine uses a diffusion pump to evacuate. Most of them are large-scale equipment, so relatively speaking, the cost will be relatively high. Therefore, most businesses attach great importance to the maintenance and maintenance of the diffusion pump of the vacuum coating machine. The following will be summarized The vacuum editor will introduce in detail how to maintain and maintain the diffusion pump:

First: The cooling water must be unblocked during the working process of the diffusion pump. After the heating is stopped, the cooling water must be turned off only after the working fluid of the pump has been completely cooled.
Second: When the diffusion pump stops working, the pump should maintain a vacuum state to avoid deterioration of the pump oil.
Third: The gas to be pumped should be dry, non-corrosive, and dust-free.
Fourth: If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil pollution and corrosion of various parts and blow off the remaining water in the cooling water sleeve. Keep the room temperature of the venue should be between 10-40 degrees Celsius.
Fifth: The performance of the diffusion pump will gradually deteriorate after long-term work, so it should be checked regularly. Such as: whether the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; the parts and pump cavity are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at a temperature of 80-100 degrees Celsius or blown dry with a hair dryer . After processing, assemble in order to keep the pump core and pump bottom vertical and concentric with the pump chamber, and the gaps between the nozzles at all levels should be adjusted according to the original requirements.
Sixth: After the water evaporates, install the pump core, add new diffusion pump oil, and reinstall the body, connect the water pipe, install the electric hob, and then restart the machine.
Seventh: Before restarting the pvd coating machine, pay attention to the leak detection work. The method is: start the maintenance pump, close the door, observe the vacuum degree after a few minutes, and check whether the sealing rubber ring is missing at the connection, or the sealing ring is crushed. It can be heated only after the hidden danger of air leakage is eliminated, otherwise the diffusion pump oil will burn out and cannot enter the working state.