A pvd coating machine requires many components, and without one component, it is impossible to combine it into a complete coating machine. So, what are the specific components of a coating machine? Below, I would like to introduce to you the vacuum editor, hoping to be able to:

Firstly, there must be a vacuum chamber. The workpiece that needs to be coated must be inside the vacuum chamber in order to be coated. Therefore, this coating room is an indispensable part.

Secondly, since the pvd coating machine needs to be coated in a vacuum environment, there must be components to achieve a vacuum state in the vacuum chamber,
Several pumps must be used in combination, such as mechanical pumps, Roots pumps, molecular pump systems, etc.
Thirdly, the vacuum measurement part, the vacuum measurement part of the vacuum system, is to measure the pressure inside the vacuum chamber. Like a vacuum pump, no vacuum gauge can measure the entire vacuum range, so people have made many types of vacuum gauges according to different principles and requirements. Such as thermocouples, ionization meters, Pirani meters, and so on.
Fourthly, in terms of power supply, the target power mainly includes DC power supply, intermediate frequency power supply, pulse power supply, and radio frequency power supply (RF). Common power supply manufacturers include AE, ADL, Hottinger, etc
Fifth: Process gas input system. Process gases, such as argon (Ar), krypton (Kr), nitrogen (N2), acetylene (C2H2), methane (CH4), hydrogen (H2), oxygen (O2), etc., are generally supplied by gas cylinders and pass through gas pressure reducing valves, gas shut-off valves, pipelines, gas flow meters, solenoid valves, piezoelectric valves, and then enter the vacuum chamber. The advantage of this gas input system is that the pipeline is simple and fast, and it is easy to repair or replace gas cylinders.
Sixth: For the mechanical transmission part, the coating requires a uniform and consistent thickness around the periphery. Therefore, there must be three rotations during the coating process to meet the requirements. That is, while the large workpiece table is required to rotate (I), the small workpiece bearing table also rotates (II), and the workpiece itself can rotate simultaneously (III). In mechanical design, a large driving gear is usually located in the center of the bottom of the large workpiece turntable, surrounded by small planetary gears that mesh with it. If the product needs to rotate itself, a fork is usually used to move the workpiece to rotate.
Seventh: Heating and temperature measurement: pvd coating machine generally have heaters at different positions, and thermocouples are used to measure and control the temperature. However, due to the different positions of the thermocouple clamp and the workpiece, the temperature reading cannot be the true temperature of the workpiece. There are many methods to measure the true temperature of a workpiece, such as installing a high-temperature test paper or thermocouple on the workpiece.
Eighth: Ion evaporation and sputtering source. The evaporation source for multi arc plating is generally in the shape of a circular cake, commonly known as a circular cake target, and there are also rectangular multi arc targets. The target seat is equipped with a magnet, which can be moved back and forth to change the magnetic field strength and adjust the arc spot movement speed and trajectory. In order to reduce the temperature of the target and its seat, it is necessary to continuously inject cooling water into the target seat. To ensure high conductivity and thermal conductivity between the target and the target seat, tin gaskets can also be added between the target and the target seat. Magnetron sputtering coating generally uses rectangular or cylindrical sputtering cathodes.
Ninth: Water cooling system, generally composed of a cooling tower, ice chiller, water pump, etc.
Tenth: Industrial Control System