There are many coating technologies for pvd coating machine, such as electronic evaporation coating technology, multi-arc ion coating technology, and magnetron sputtering coating technology. However, they generally have relatively high requirements on film structure, smoothness, adhesion, hardness, and corrosiveness. Using magnetron sputtering coating technology. Magnetron sputtering coating can be formed at low temperature, has a fine structure, good corrosion resistance and smooth surface. It is the best choice for surface treatment of many high-end products. Magnetron sputtering in vacuum coating machines is currently a widely used thin film deposition technology. The continuous development of sputtering technology and the exploration and research of new functional films have extended the application of magnetron sputtering to many production and scientific research fields.

1. In the field of microelectronics, as a non-thermal coating technology, it is mainly used in the deposition of material thin films that are difficult and unsuitable for chemical vapor deposition (CVD) or metal organic chemical vapor deposition (MOCVD), and can achieve very uniform coating over a large area. of film. Including ohmic contact Al, Cu, Au, W, Ti and other metal electrode films and TiN, Ta2O5, TiO, Al2O3, ZrO2, AlN and other dielectric film deposition that can be used for gate insulating layers or diffusion barrier layers.
2. Magnetron sputtering technology is also used in optical films (such as anti-reflection coatings), low-e glass and transparent conductive glass. SiO2 thin films and doped ZnO or InSn oxide (ITO) thin films are prepared by sputtering on transparent conductive glass on a glass substrate or flexible substrate, so that the average light transmittance in the visible light range is above 90%.
3. In the modern mechanical processing industry, the use of magnetron sputtering technology to produce surface functional films, superhard films, and self-lubricating films can effectively improve surface hardness, composite toughness, wear resistance, and high-temperature chemical stability, thus Significantly improve the service life of coating products.
In addition to the above-mentioned fields where it has been widely used, pvd coating machine magnetron sputtering also plays an important role in the research of high-temperature superconducting films, ferroelectric films, giant magnetoresistive films, thin film luminescent materials, solar cells, and memory alloy films.