The multi-arc ion plating process of pvd coating machine is widely used in real life. It has the advantages of fast deposition rate, uniform film thickness, good adhesion, high effect, and low cost. It is favored by coating manufacturers in the market. Below, the editor of Huicheng Vacuum will introduce in detail the working principle and characteristics of multi-arc ion plating of pvd coating machine. I hope it will be helpful to you:

The working principle of multi-arc ion plating technology of pvd coating machine is mainly based on the cold cathode vacuum arc discharge theory. After the multi-arc ion coating machine ignites the vacuum arc, some discontinuous bright spots with various sizes and shapes appear on the surface of the cathode target. They swim rapidly and irregularly on the cathode surface. When some spots are extinguished, some spots appear on the surface. Formed in other parts to maintain arc burning. The current density of the cathode spot reaches 104~105A/cm2, and metal vapor is emitted at a speed of 1000m/s. Every 10 electrons emitted can emit 1 metal atom, and then these atoms are ionized into high-energy positive ions. (such as Ti+), positive ions combine with other ions (such as N- to form TiN) when running in the vacuum chamber, and are deposited on the surface of the workpiece to form a coating.
Vacuum arc discharge theory believes that the migration of electricity mainly relies on field electron emission and positive ion current. These two mechanisms exist at the same time and restrict each other. During the discharge process, the cathode material evaporates in large quantities. The positive ions generated by these evaporated atoms generate an extremely strong electric field within a short distance near the cathode surface. Under the action of such a strong electric field, the electrons are enough to directly transfer from the Fermi energy of the metal. The stages escape into the vacuum, producing what is called "field electron emission."

The outstanding feature of the multi-arc ion plating process of the pvd coating machine is that it can produce a plasma composed of highly ionized evaporated materials, in which the ions have high kinetic energy. Evaporation, ionization, and acceleration are all concentrated in the cathode spot and a small area near it. Its characteristics are as follows:
(1) The most significant feature is the direct generation of plasma from the cathode.
(2) The incident particle energy is high, the coating has high density, good strength and durability.
(3) The ionization rate is high, generally up to 60% to 80%.
(4) The deposition speed is fast and the plating properties are good.
(5) The equipment is relatively simple, and it is safer to work with low-voltage power supply.
(6) One arc has multiple uses. The arc is not only an evaporation source and an ionization source, but also a heating source and an ion source for ion sputtering cleaning.
(7) The external magnetic field can improve the arc discharge, break up the arc, refine the coating particles, increase the rate of charged particles, improve the uniformity of cathode target surface etching, and increase the utilization of the target material.