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Leak detection method of pvd coating machine

2023-10-26

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Detecting leaks in the pvd coating machine is an essential part of maintaining the pvd coating machine. When air leakage is found in the cavity of the pvd coating machine, it is very important to investigate and deal with it in time. Generally, air leakage in the vacuum chamber occurs from some small holes on the chamber wall or from the small joints in front of the components. When the air extraction system evacuates the air, the pressure in the vacuum chamber drops. The pressure difference between the outside and inside causes the gas to flow from the high-pressure place. The external flow flows into the vacuum chamber with low pressure, causing the vacuum degree to decrease.


pvd coating machine


During the leak detection process of pvd coating machine, you need to pay attention to the following issues in order to do a good job in leak detection.
1. Confirm whether the air leakage is a virtual leak or a real leak. Because the workpiece material will produce gas to varying degrees after heating, it may be mistaken for gas flowing in from the outside. This is a virtual leak, and this situation must be ruled out.
2. Test the gas sealing performance of the vacuum chamber. Ensure air tightness meets requirements
3. Check the size, shape, location and speed of the leak, and prepare and implement possible solutions.
4. Determine the minimum detectable leak rate and leak detection sensitivity of the detection instrument, detect air leaks to the greatest extent, avoid some leak holes from being ignored, and improve the accuracy of leak detection.
5. Grasp the reaction time and elimination time of the leak detection instrument. Master the time well to ensure that the leak detection equipment works in place. If the time is too little, the leak detection effect will definitely be poor. If the time is too long, the leak detection gas and labor and electricity costs will be wasted.
6. Avoid clogging of leak holes. Sometimes due to operational errors, some dust or liquid blocks the leak hole during the leak detection process, and it is thought that there is no leak hole at that location. However, when these blockers cause the leak hole to not block due to the increase in internal and external pressure differences or other reasons, then The leak is still there.
It is very important to do a good job of leak detection for the pvd coating machine. There are various reasons for the decrease in vacuum degree. We must solve these reasons one by one to stabilize the coating effect.
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