When using a vacuum coating machine, you cannot avoid paying attention to some daily precautions. Timely prevention and elimination can effectively reduce the occurrence of sudden failures and extend the service life of the machine. Below, the editor of Huicheng Vacuum will list in detail the precautions for daily vacuum coating machines.
1. Clean the vacuum chamber regularly and try to dry it as much as possible. Wash it thoroughly every time to avoid making it more and more difficult to clean. After drying and then coating, the first batch should be coated four times longer than the original time.
2. Regularly replace the diffusion pump oil, vacuum pump and Roots pump oil. Before replacing the diffusion pump oil, be sure to confirm whether the vacuum degree is lower than 1X102Pa, and whether the oil temperature in the diffusion pump is completely cooled to normal temperature before heating or inflating for disassembly, otherwise it will cause serious consequences that may harm people.
3. The entire system should be kept in a vacuum state at ordinary times and be filled with gas before work. Do not expose the vacuum chamber to the atmosphere for a long time.
4. Always check whether the rubber seal is in good condition, especially the dynamic sealing ring, and add vacuum grease to the dynamic sealing area regularly.
5. Check electrical components regularly, remove dust, and replace burned out components.
6. Do not disassemble the diffusion pump and valves under vacuum conditions. The disassembly method is: first pump the entire vacuum system to a vacuum state, be careful not to heat the diffusion pump, manually open the fine extraction valve, and then press the release valve button to allow the system to be filled with atmosphere. When the vacuum chamber is filled with atmosphere, it can be disassembled. Diffusion pumps and valves.
7. When stopping the rotary vane pump or slide valve pump, pay attention to whether the solenoid valve (or pneumatic valve) inflates the pump cavity, otherwise it will cause oil return and contaminate the vacuum pipeline. Therefore, when the solenoid valve (or pneumatic valve) fails to inflate, it must be repaired or replaced in time.
8. For northern areas, in cold seasons, at night and when shutting down for a long time, compressed gas must be used to drive the cooling water out of the cooling pipes and pump bodies to avoid freezing and cracking the cooling water pipes (jackets) and pump bodies.
9. The fine pumping system can only work after the vacuum pressure reaches 3Pa. If the vacuum is pumped at too high a pressure, the diffusion pump oil will be oxidized, the pumping capacity will be reduced, and the service life of the pump oil will be shortened.
10. In order to ensure a clean working environment for the vacuum coating equipment, the gas discharged from the slide valve pump must be discharged out of the workroom through pipelines, because the gas discharged from the slide valve pump contains a lot of tiny oil mist that will contaminate the plated workpiece. , seriously affecting the quality of the film layer.
11. The water supply must not be cut off during work, and the cooling water used must be clean. Hard water or turbid water must not be used as cooling water, otherwise a layer of scale will be deposited on the cooling water pipes, which will affect the cooling effect.
The above only lists a few important daily precautions for
vacuum coating machines. There are many details, so I won’t list them one by one.