There are two methods for plating functional films, CVD method and PVD method. Today, the editor of Huicheng Vacuum will introduce to you the method of plating functional films on pvd coating machine, which is made by PVD plating. I hope it can help. To everyone:
The PVD method uses physical forms such as evaporation or sputtering to remove materials from the target source, and then deposits these energy-carrying vapor ions onto the surface of the substrate or part through a vacuum or semi-vacuum space to form a film layer. Through the gas phase reaction process, The evaporated or sputtered metal atoms undergo a gas phase reaction to deposit the required compound on the tool surface. PVD coating can coat titanium nitride, titanium carbonitride, aluminum titanium nitride compounds, and carbides and nitrides of various refractory metals.
Currently, commonly used PvD methods include low voltage electron beam evaporation (LVEE), cathode electron arc deposition (CAD), transistor high voltage electron beam evaporation (THVEE), unbalanced magnetron sputtering (UMS), and ion beam assisted deposition. method (IAD) and kinetic ion beam mixing method (DIM). The main difference lies in the vaporization method of the deposition material and the method of generating plasma, which results in differences in film formation speed and film quality.
PVD technology is mainly used in the surface treatment of solid carbide tools and high-speed tool steel tools. It has been widely used in the coating treatment of carbide drills, milling cutters, reamers, taps, special-shaped tools, welding tools, etc.
Compared with the CVD method, the PVD method has the following advantages:
The coating temperature (300~500℃) is lower than the tempering temperature of high-speed tool steel, so the hardness and dimensional accuracy of high-speed tool steel tools will not be damaged. Heat treatment is no longer required after coating. The effective thickness of the coating is only a few microns, so it can ensure the original accuracy of the tool and is suitable for coating high-precision tools. The coating has high purity and good density, the coating and the substrate are firmly bonded, and the coating performance is not affected by the substrate material. The coating is uniform and there is no thickening or rounding at the cutting edges and arcs, so even complex tools can be coated evenly. There will be no decarburization phase, and the coating will not be easily brittle due to chlorine corrosion and hydrogen embrittlement deformation caused by the CVD method. The coated blade has high strength. The working process is clean, pollution-free and pollution-free.
At present, the PVD technology of vacuum coating machines not only improves the bonding strength between the film and the tool base material, but the coating composition has also developed from a single coating to TiC, TiCN, ZrN, CrN, MoS2, TIAIN, TiAICN, TiN-AIN, CN, etc. A multi-composite coating, and due to the emergence of nano-scale coatings, there has been a new breakthrough in the quality of PVD coated tools. This thin film coating not only has high strength, hardness close to CBN, good oxidation resistance, but also can effectively It can accurately control the shape and accuracy of the cutting edge of precision tools. When performing high-precision processing, its processing accuracy is no less than that of uncoated tools.