The diffusion pump is the main component of the pvd coating machine. It is a high vacuum pump that allows the machine to operate at its best. It is very important to maintain and maintain the diffusion pump of the pvd coating machine. Today I will share with you the knowledge on repair and maintenance of diffusion pump of pvd coating machine.

1. The cooling water must be kept flowing smoothly during the operation of the diffusion pump. After stopping heating, the cooling water must be turned off only after the pump working fluid has been completely cooled.
2. When the diffusion pump stops working, the vacuum should be maintained in the pump to prevent the pump oil from deteriorating.
3. The gas to be pumped should be dry, non-corrosive and dust-free.
4. If the diffusion pump is not used temporarily, it should be kept in a vacuum state during storage to avoid pump oil contamination and corrosion of various parts, and the remaining water in the cooling water jacket should be blown away. Keep the room temperature of the venue between 10-40 degrees Celsius
5. The performance of the diffusion pump will gradually deteriorate after long-term operation and should be checked regularly. For example: if the pump oil is reduced or oxidized, refuel or replace it according to the corresponding requirements; the parts and pump cavity are first cleaned with aviation gasoline, then scrubbed with acetone, and dried at 80-100 degrees Celsius or dried with a hair dryer. . After processing, assemble in sequence, keeping the pump core and pump bottom vertical and concentric with the pump chamber, and the nozzle clearances at all levels should be adjusted according to the original requirements.
6. After the water has evaporated, install the pump core, add new diffusion pump oil, reinstall the body, connect the water pipes, install the electric stove, and then restart the machine.
7. Pay attention to leak detection before restarting the machine. The method is: start the maintenance pump, close the vacuum chamber door, and after a few minutes, observe whether the vacuum degree is 6*10 0 Pa. Otherwise, a leak test is required to check whether the sealing ring is missing at the connection or the sealing ring is crushed. Heating can only be done after eliminating the risk of air leakage, otherwise the diffusion pump oil will burn out and cannot enter working condition.

The diffusion pump is one of the pumps in the air extraction system of the pvd coating machine. To use the diffusion pump to evacuate, a mechanical pump must be assisted, and a Roots pump must first evacuate a low vacuum. I won’t introduce them one by one here, but I will introduce them one by one next time.