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Advantages of titanium and its application in pvd coating machines

2023-11-24

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In the magnetron sputtering pvd coating machines process, titanium target is one of the most commonly used target materials. The titanium target not only has good adhesion, but also can produce a variety of beautiful colors by adding appropriate reactive gases to the titanium target. Such as: titanium gray, gun gray, black, imitation gold, brown, blue, purple, etc., and there are many more.

Secondly, titanium has very good adhesion, and also has very good adhesion to ceramic and glass substrates, so titanium can be used as a base film material for membrane materials with poor adhesion. Titanium can also be used as a material for thin film resistors or thin film capacitors. Titanium has strong adsorption capacity for active gases (such as CO, CO2, N2, O2 and water vapor above 650℃). The fresh Ti film evaporated on the mercury wall forms a surface with high adsorption capacity and has excellent suction properties. Performance, it can react chemically with almost all gases except inert gases. This property makes Ti widely used as a getter in ultra-high vacuum pumping systems, such as titanium sublimation pumps, sputtering ion pumps, etc.


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The corrosion resistance of titanium is also very good. Titanium is a very active metal with a very low equilibrium potential and a high tendency of thermodynamic corrosion in the medium. But in fact, titanium is very stable in many media. For example, titanium is corrosion-resistant in oxidizing, neutral and weakly reducing media. This is because titanium has a great affinity with oxygen. In air or oxygen-containing media, a dense, highly adhesive, and inert oxide film is formed on the titanium surface, which protects the titanium matrix from corrosion. Even due to mechanical wear and tear, it will quickly heal itself or regenerate. This shows that titanium is a metal with a strong tendency to passivate. When the medium temperature is below 315°C, the titanium oxide film always maintains this characteristic. Titanium has metallic luster and ductility. Density is 4.5 g/cm3. Melting point 1660±10℃. Boiling point 3287℃. Valence +2, +3 and +4. The ionization energy is 6.82 electron volts. The main characteristics of titanium are low density, high mechanical strength and easy processing. The plasticity of titanium mainly depends on its purity. The purer the titanium, the greater its plasticity. It has good corrosion resistance and is not affected by the atmosphere and sea water. At normal temperature, it will not be corroded by hydrochloric acid below 7%, sulfuric acid below 5%, nitric acid, aqua regia or dilute alkali solutions; only hydrofluoric acid, concentrated hydrochloric acid, concentrated sulfuric acid, etc. can act on it.

Titanium is "biophilic". In the human body, it can resist the corrosion of secretions and is non-toxic, and is adaptable to any sterilization method. Therefore, it is widely used in the production of medical devices, artificial hip joints, knee joints, shoulder joints, hypochondrium joints, skulls, active heart valves, and bone fixation clips. When new muscle fiber rings wrap around these "titanium bones", these titanium bones begin to maintain the normal activities of the human body. Titanium is a non-magnetic metal and will not be magnetized in a large magnetic field. It is non-toxic and compatible with Human tissue and blood have good compatibility, so it is used by the medical community.

Good heat resistance and low temperature resistance. New titanium alloys can be used for long periods at temperatures of 600°C or higher. The strength of low-temperature titanium alloys represented by titanium alloys TA7 (Ti-5Al-2.5Sn), TC4 (Ti-6Al-4V) and Ti-2.5Zr-1.5Mo increases as the temperature decreases, but the plasticity does not change. big. It maintains good ductility and toughness at low temperatures of -196-253°C, avoiding the cold brittleness of metal. It is an ideal material for low-temperature containers, storage boxes and other equipment.

After titanium metal is subjected to mechanical vibration and electrical vibration, its own vibration attenuation time is the longest compared with steel and copper metals. This property of titanium can be used as tuning forks, vibration components of medical ultrasonic pulverizers, and vibration films of high-end audio speakers. This property of titanium shows that its yield strength ratio (tensile strength/yield strength) is high, indicating that titanium metal materials have poor plastic deformation during forming. Due to the large ratio of titanium's yield limit to elastic modulus, titanium has a large resilience during molding.

Because titanium has the above advantages, titanium targets are widely used in pvd coating machines. They can be used to make color films with several gases to make various colors. They can also be used to make large base layers to improve the relationship between the film and the substrate. Adhesion performance to meet market demand.
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