There are many types of pvd coating machines. Some manufacturing companies are classified by application fields, and some are classified by coating technology. However, if we classify them by application field, it will be better to differentiate, because the application fields of vacuum coating machines are relatively wide, so if we classify them by field, the classification will be more accurate and the distinction will be better. Therefore, when purchasing a vacuum coating machine, be sure to inform the manufacturer about what workpieces are to be plated, what coatings are to be coated, and any special requirements, etc., so that the manufacturer can recommend a pvd coating machine corresponding to the application field. Here are some pvd coating machine purchase points prepared by the editor of Huicheng Vacuum. I hope they can help you:
1. The furnace body can be made of stainless steel, carbon steel or their combination materials.
2. Select coating equipment of different specifications and models according to process requirements, including resistance evaporation, electron beam evaporation, magnetron sputtering, magnetron reactive sputtering, ion plating, hollow cathode ion plating, multi-arc ion plating, etc.
3. The clamp operation has rotation, rotation and rotation + rotation modes. Users can put forward corresponding requirements according to the size and shape of the substrate. Speed range and accuracy: ordinary adjustable and variable frequency speed adjustment.
4. The vacuum system consists of mechanical pumps, diffusion pumps, oil booster pumps, expansion pumps, Roots pumps, crucible wheel molecular pumps, etc. and supporting pneumatic, manual, and electric valves, pipelines, etc.
5. According to the process requirements, select the electroplating method and form, such as resistance evaporation (tungsten wire, molybdenum boat, graphite boat) magnetron source (coaxial cylindrical magnetron source, cylindrical planar magnetron source, rectangular planar magnetron source) Control source, etc.), target material and multi-arc source size (Ф60, Ф80 diameter target, pneumatic, arc start, etc.). For vacuum measurement, digital smart vacuum gauges and their high-quality measurement procedures can be used, as well as other measuring instruments, such as Automatic pressure controller, etc. Film thickness can be measured by square resistance meter, transmittance meter, etc.
6. The filling method can choose mass flow meter, rotameter + needle valve and corresponding filling valve, and multi-channel filling pipeline and corresponding flow parameters can be selected.
7. Based on the baking structure, the baking temperature, materials and corresponding equipment are proposed.
8. According to the characteristics of the equipment, manual, semi-automatic, fully automatic or their combination control methods can be selected.
9. Provide sound and light alarms for abnormal conditions such as phase loss, water shortage, air pressure, power load overvoltage, overcurrent and other abnormal conditions of the
pvd coating machine body and diffusion pump.