HCMS series

High precision multicavity

Magnetron sputtering

optical coating machine

Vacuum application solution supplier
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Intelligent automobile component coating machine

It has the oxidation mode after RF-ICP Assisted Magnetron sputtering, high deposition rate and matching optical properties. It is suitable for car cover glass and 3C front cover glass to deposit ar film. Ar film can be either ordinary SiO2 + Nb2O5 film or hard SiO2 + Si3N4 film. At the same time, it is also suitable for the processing of 3C product back cover color film (including gradient film) and NCVM film.

Compared with the ordinary plane target device in the industry, the service cycle and utilization efficiency of the target material of the rotary cathode device are significantly improved; the customized structure of the base plate work-piece rack can provide customers with the maximum utilization space for their products; the fully automatic lifting and lifting rotary rack device can greatly reduce the opening and closing time of the machine and greatly improve the production efficiency and process stability; Huicheng patent is issued The sub source has the characteristics of wide working range, energy balance, high ionization rate, super stable working efficiency and low energy consumption.

It can precisely control the film thickness by time to meet the design process requirements, save crystal control and optical control links, and save a lot of consumables for film thickness meter; it can produce high refractive index nitrided film to improve the hardness performance of film; it can form film at low temperature to cope with various uses; it can automatically adjust the gas flow patent device to maintain stable target voltage to ensure the film quality; it can also select "correction plate" External adjustment mechanism ".

Product Advantage.

HCMS series Intelligent automobile component coating machine includes the following key capabilities:
  • Colourful

    Metallized color film

  • Compact

    Small footprint, easy to integrate into the factory

  • Effective

    High deposition rate, low substrate temperature rise and small film damage

  • Accurate

    Accurate control of plating thickness

  • Excellent

    The film has high purity, good compactness and uniformity

  • Monitor

    Local or remote monitoring of coating process

Specifications
Mode HCSO-1650T
Effective area Φ1650x H850mm
Structure Multicavity chamber
Performance
Rotational speed 10~100RPM(variable)
Process chamber pumping down time Atmospheric pressure to 10Pa less than 5min
Process chamber pumping down time 3.0×10-3Pa≤15min
Ultimate vacuum 8.0×10-5Pa (for process chamber)
Targets Nb,Si,Cr,Al,Ti,In,Nb2O5,ITO,C ...
Main configuration
Fixture Center Rotation Driving / Holder board mechanical structure transmission
Hanging board (Holder board width200~300 ) × H850mm
older board Customization
Pumping Roughing Pump + High Vacuum Pump + Polycold
Vacuum Gauge Vacuum Controller, Penning Gauge, Pirani Gauge
Coating Unit DC or MF Magnetron Sputtering Source + ICP Plasma Source + In-line AF/AS Evaporation Source
Process Gas MFC Mass flow controller or APC Automatic pressure controller
Electrical Control PC+PLC
Application
Application UV/IR Cut filter, Band Pass Filter, RGB Filter, Lidar, AR, Hard AR Coating, Hard Coating, HR Coating, AS/AF, etc. Available for 2D or 3D substrate.
Wavelength 300nm~1560nm
Remark: Customization (Reference data only)
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