HCSH series

Low friction coating

Vacuum application solution supplier
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Component functional coating machine

Specially designed for friction high load system, the application of low friction performance coating opens a new perspective and technical solution for the surface treatment of automobile parts, improves the system efficiency and component service life. The enhanced friction performance can not only prevent parts from wearing, but also polish and protect the relative parts during operation.

The design and materials of vacuum sealing and indoor moving parts of vacuum plating chamber should be fully considered to withstand high temperature.

It can also be equipped with multiple high-efficiency circular arc evaporation sources, multiple rectangular plane arc evaporation sources, and multiple hollow cathode guns. Meanwhile, it is equipped with an impact resistant bias power supply with excellent arc extinguishing performance to ensure sufficient plasma density and reactivity, and improve the film compactness and adhesion.

The unique magnetic field control technology makes the arc move rapidly on the whole surface of the target, the coating surface is smooth and dense, the target surface is evenly etched, and the coating adhesion is optimized. Low temperature to 300 ℃ also has excellent coating adhesion. The new technology brings faster batch turnover efficiency, optimizes coating production efficiency, high precision and uniform coating thickness within the effective coating range.

Product Advantage.

HCSH series component functional coating machine includes the following key capabilities:
  • Compact

    Small footprint, easy to integrate into the factory

  • Uniformity

    Uniform deposition rate in the whole chamber

  • Simple

    Easy to operate and maintain

  • Modularization

    Flexible combination of various technologies

  • DLC

    Durable diamond-like carbon coatings

  • Monitor

    Local or remote monitoring of coating process

Mode HCSH-400
Usable Plasma Coating area D400×H450mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 4~5h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×4 axis
Max Loading Capacity 200KG
Remark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
Mode HCSH-650
Usable Plasma Coating area D650×H750mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 5~8h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×8 axis
Max Loading Capacity 500KG
emark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
Mode HCSH-900
Usable Plasma Coating area D900×H1200mm
Max Working Temperature 550℃
Technology Characteristic PMAⅡ
AEG
HIPIMS
Pretreatment ARC, AEG, DC, MF, HIPIMS
Cathode D120 / D160 / W125
Ultimate Vacuum Ultimate Vacuum ≤5×10-4Pa
Work Vacuum ≤5×10-3Pa
Process Cycle From closing to opening 7~10h
TiN:2~2.5um
TiAlN:2~2.5um
TiSiN:2~3.5um
Machine Configuration Magnetically Levitated Molecular Pump ×2
Pulse Bias Supply
PC Intelligent Control System
Standard Shaft D140×12 axis
Max Loading Capacity 500KG
emark Adopt the sputtering(UBM, RF, etc.),the effective height will be reduced
Online Service Support System
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E-mail: info@hcvac.com

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