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Magnetron sputtering web vacuum coating machine

2021-09-28

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Magnetron sputtering winding coating technology can deposit various metals, alloys, compounds, ceramics and other materials on flexible substrates by means of direct current, intermediate frequency and radio frequency.

Compared with evaporation web coating equipment, magnetron sputtering winding coating equipment has lower production efficiency and higher equipment cost, which is determined by the coating principle. However, magnetron sputtering has many advantages, such as low coating temperature, capability of placing multiple targets at any position and continuously plating multiple films, wide application range of coating materials, controllable film thickness, fine and uniform, firm adhesion, etc.

Various dielectric films, such as SiO2, Si3N4, Al2O3, SnO2, ZnO, Ta2O5, can be deposited on flexible substrates by magnetron sputtering. And metAl films such as al, Cr, Cu, Fe, Ni, SUS, TiAl, etc. Transparent conductive films can be plated with ITO, AZO and other ceramic targets. The AR antireflection film, HR high reflection film, AR+ITO high transmission conductive film, low radiation Low-E and solar control film are coated with multilayer optical film structure. It is mainly used for the films of front barriers and glass doors and windows of automobiles, trains and ships, building doors and windows and curtain walls, anti-static and electromagnetic films, decorative films and packaging films, solar greenhouse films, electric heater films, anti-fog transparent films, transparent electrode films for FPD flat panel displays, and optical multilayer films on metal belts to make thin-film solar cells. For example, ITO transparent conductive film can be used as cold luminescent material, the protective clothing against electromagnetic radiation can be made by coating SiO2 on the surface of cotton cloth, Ni-coated sponge can be used as Ni-MH battery after winding, and substrates coated with various materials can be used as electronic books and flexible display devices.

Magnetron sputtering winding coating technology covers a wide range of fields. Although it started later than evaporation winding coating technology, it has developed rapidly, and will have great potential in the future high-tech fields and environmental protection and energy saving fields.

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