In order to improve the film adhesion, bonding force and film structure of the workpiece, many vacuum coating machines are equipped with ion sources during the coating process.

       Although there are many types of ion sources, the purpose is nothing more than online cleaning, improving the energy distribution of the plated surface and modulating to increase the energy of the reaction gas. The ion source can greatly improve the bonding strength of the film and the substrate, and at the same time, the hardness and wear and corrosion resistance of the film itself will also be improved. If the wear-resistant layer of the tool is plated, the thickness is generally large and the uniformity of the film thickness is not high. An ion source with a large ion current and a high energy level can be used, such as a Hall ion source or an anode layer ion source.
      The anode layer ion source is similar in principle to the Hall ion source. A strong magnetic field is applied in an annular (rectangular or circular) slit, and the working gas is ionized and directed towards the workpiece under the action of the anode. The anode layer ion source can be made very large and long, especially suitable for coating large workpieces, such as architectural glass. The anode layer ion source ion current is also larger. But its ion current is more divergent, and the energy level distribution is too broad. Generally suitable for large workpieces, glass, wear, decorative workpieces. But there are not many applications for advanced optical coatings.
      Although there are many types of ion sources, the purpose is nothing more than online cleaning, improving the energy distribution of the plated surface and modulating to increase the energy of the reaction gas. The ion source can greatly improve the bonding strength of the film and the substrate, and at the same time, the hardness and wear and corrosion resistance of the film itself will also be improved. If the wear-resistant layer of the tool is plated, the thickness is generally large and the uniformity of the film thickness is not high. An ion source with a large ion current and a high energy level can be used, such as a Hall ion source or an anode layer ion source.
      The anode layer ion source is similar in principle to the Hall ion source. A strong magnetic field is applied in an annular (rectangular or circular) slit, and the working gas is ionized and directed towards the workpiece under the action of the anode. The anode layer ion source can be made very large and long, especially suitable for coating large workpieces, such as architectural glass. The anode layer ion source ion current is also larger. But its ion current is more divergent, and the energy level distribution is too broad. Generally suitable for large workpieces, glass, wear, decorative workpieces. But there are not many applications for advanced optical coatings.
      The Hall ion source equipped with the vacuum coating machine is an anode that plasmons the process gas in cooperation with a strong axial magnetic field. The strong imbalance of this axial magnetic field separates the gas ions and forms an ion beam. Because the effect of the axial magnetic field is too strong, the Hall ion source ion beam needs supplementary electrons to neutralize the ion flow. A common source of neutralization is the tungsten filament (cathode).