There are many kinds of coating technologies for vacuum coating machine, such as electronic evaporation coating technology, multi-arc ion coating technology, and magnetron sputtering coating technology, but generally, the requirements for film structure, smoothness, adhesion, hardness and corrosion are relatively high. Using magnetron sputtering coating technology. Magnetron sputtering coating can be formed at low temperature, with fine structure, good corrosion and smooth surface. It is the best choice for surface treatment of many high-end products. Magnetron sputtering of vacuum coater is currently a widely used thin film deposition technology. The continuous development of sputtering technology and the exploration and research of new functional thin films have extended the application of magnetron sputtering to many production and scientific research fields.

 1. In the field of microelectronics, as a non-thermal coating technology, it is mainly used in chemical vapor deposition (CVD) or metal organic chemical vapor deposition (MOCVD) for the deposition of difficult and unsuitable material films, and can obtain a large area and very uniform film. Including ohmic contact Al, Cu, Au, W, Ti and other metal electrode films and dielectric films such as TiN, Ta2O5, TiO, Al2O3, ZrO2, AlN that can be used for gate insulating layers or diffusion barrier layers.
        Second, magnetron sputtering technology has also been applied in optical thin films (such as anti-reflection films), low-emissivity glass and transparent conductive glass. On the glass substrate or flexible substrate of transparent conductive glass, SiO2 film and doped ZnO or InSn oxide (ITO) film are prepared by sputtering, so that the average light transmittance in the visible light range is above 90%.
       3. In the modern machining industry, the use of magnetron sputtering technology to make surface functional films, superhard films, and self-lubricating films can effectively improve surface hardness, composite toughness, wear resistance and high-temperature chemical stability. Greatly improve the service life of coated products.
      In addition to the above-mentioned fields that have been widely used in vacuum coating machines, magnetron sputtering also plays an important role in the research of high temperature superconducting thin films, ferroelectric thin films, giant magnetoresistive thin films, thin film luminescent materials, solar cells, and memory alloy thin films.