The vast majority of optical vacuum coating machines use electron gun coating technology, which has high cost, large investment, and large equipment volume. Therefore, we pay more attention to the cleaning and maintenance of optical vacuum coating machines. The following is a vacuum editor for everyone to introduce in detail. Here is the maintenance and cleaning method of the optical vacuum coating machine, I hope it can help you:
After the optical vacuum coating machine is used for one week (three shifts), the coating material is not only coated on the surface of the workpiece, but also is coated on the lining plate in the studio due to its non-orientation, and the thicker the coating is, the thickness of the layer is due to the organization. , loose around, absorb a large amount of gas and cause the vacuum coating equipment to pump more and more slowly. At this time, the studio and the lining board should be cleaned. If there are unnecessary parts to be removed, they can be cleaned with sandpaper. The lining board can be soaked in an aqueous solution of hydrofluoric acid. The ratio of hydrofluoric acid and water depends on the length of soaking time and the The principle of not hurting the lining. The lining board must be dried with moisture before installation. Before drying, the moisture of the lining board should be wiped off as much as possible. After cleaning the work frame and other parts with sandpaper, all the dust in the vacuum chamber needs to be cleaned up. This can be cleaned with a vacuum cleaner. When the liner is finally installed, both the vacuum chamber and the liner need to be wiped clean with alcohol. Due to the use of electron guns and ion sources to assist coating, it may be difficult to clean, and methods such as sandblasting can be used to clean.
The optical vacuum coating machine needs to replace the diffusion pump oil regularly. The diffusion pump oil is used for a period of time, about two months (two shifts). Due to the long-term high temperature environment, although the diffusion pump is only activated when the vacuum is high, there are still residual oxygen and other components Make it react with the diffusion pump oil, and the diffusion pump oil may also crack at high temperature, which reduces the quality and prolongs the pumping time. It should be replaced when in our opinion it has been extended too far. Maintain the mechanical pump oil in use for two months, the oil quality will change. Because the oil may be sucked into water, impurities and other reasons, the viscosity of the used oil will deteriorate and the vacuum will drop, so it needs to be replaced. If it is a new equipment, it should be replaced in the first half month of use, because during the running-in period, the oil contains a lot of running-in iron powder, which will aggravate the wear and tear.
The optical
vacuum coating machine needs to regularly clean the equipment and its surrounding environment, keep the inside and outside of the equipment clean, organize the surrounding environment of the equipment in an orderly manner, and have a good working environment to ensure safety.