The coating technology of ion vacuum coating machine is referred to as ion plating. It is a coating technology developed by Sandin Company in the United States that combines vacuum evaporation and vacuum sputtering. Ionization is the process of depositing vapors or other reactants on the surface of the substrate to be plated under the ion bombardment of working gas ions or vaporized substances.
Under the bombardment of gas ions or vaporized material ions, the vaporized material or its reactant is evaporated on the workpiece. These include magnetron sputtering ion plating, reactive ion plating, hollow cathode discharge ion plating (hollow cathode evaporation method), multi-arc ion plating (cathode arc ion plating), etc. Ion plating combines glow discharge, plasma technology and vacuum evaporation technology, which not only significantly improves the various properties of the coating, but also greatly expands the application range of the coating technology. In addition to the advantages of vacuum sputtering, ion plating also has the advantages of strong film adhesion, good diffraction, and a wide range of plated materials. Therefore, it has developed rapidly at home and abroad in recent years. The basic principle of ion plating is to ionize a metal or alloy vapor by means of a glow or arc discharge of an inert gas. Ion plating includes heating, evaporation and deposition of coating materials (such as TiN, TiC). When the evaporated coating material atoms pass through the glow region, a small part of them are ionized, and fly to the workpiece under the action of the electric field, and hit the surface of the workpiece with the energy of several thousand electron volts, which can penetrate into the substrate to a depth of about a few nanometers. , thereby greatly improving the bonding force of the coating, and the non-ionized vaporized material atoms are directly deposited on the workpiece to form a film. The sputtering of inert gas ions and coating material ions on the workpiece surface can also remove contaminants from the workpiece surface, thereby improving the bonding force.
The coating technology of ion
vacuum coating machine is widely used, and ion technology can be used to coat metals, alloys, conductive materials, and even non-conductive material substrates. The film deposited by ion plating can be metal film, multi-component alloy film, compound film, can be plated with one layer, can also be plated with multiple layers, can also be plated with gradient coating and nano-multi-layer coating, using different film materials, different reactions Gas and different process methods and parameters can obtain surface-enhanced hard wear-resistant coatings, dense and chemically stable corrosion-resistant coatings, etc.