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What are the operating steps of the pvd coating machine?

2022-07-01

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      Pvd coating machine mainly refers to a type of coating that needs to be carried out under high vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and many others. The main idea is to divide it into two types: evaporation and sputtering. For the operation of the vacuum coating machine, refer to the instruction manual of the equipment and the labeling instructions under each knob on the pvd coating machine and the pointer display on the instrument panel. The general situation is as follows:


pvd coating machine



     1. Check whether the operation control switches of the pvd coating machine are in the "off" position.
     2. Turn on the main power switch, and the pvd coating machine will be powered.
     3. Pull out the low pressure valve. Open the inflation valve, after the sound of airflow can not be heard, start the bell valve, and the bell rises.
     4. Install the fixed tungsten spiral heater. Fix the PVDF film and aluminum cover on the rotating disc. Thread the aluminum wire into the helical heater. Clean all parts of the bell jar to ensure that there are no impurities.
     5. Drop the bell jar.
     6. Start the vacuum coating equipment vacuum mechanical pump.
     7. Turn on the power supply of the composite vacuum gauge (composite vacuum gauge model: Fzh-1A).
     8. When the pointer in the low vacuum gauge "2" moves clockwise to 6.7Pa again, the low pressure valve is pushed in. At this time, the left knob "1" is rotated to point to the measurement position of section 1.
     9. Turn on the cooling water for the pvd coating machine, start the diffusion pump, and heat for 40 minutes.
     10. Pull out the low pressure valve. Repeat the ⑦ action procedure: the lower left knob "1" turns to point to the measurement position of the 2 section. The pointer in the low vacuum meter "2" moves clockwise. When the pointer moves to 6.7Pa, open the high pressure valve (the valve stem rotates clockwise).
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