The electron gun is a very important part of the optical pvd coating machine. When the merchant purchases the optical pvd coating machine and transports it to the factory, it will involve the installation of the electron gun. The installation of the electron gun seems simple, but there are many places to pay attention to details. , The installation of the electron gun has a great influence on whether it can work normally in the later stage. It is also very important to protect the electronic gun of the optical coating machine in the later stage. The following is a vacuum editor to introduce the installation and maintenance of the electronic gun of the optical pvd coating machine. I hope it can be helpful to you:

The electron gun evaporation source control system of optical pvd coating machine is composed of electron gun filament power supply, high voltage power supply, scanning power supply, crucible driving power supply, evaporation source, etc. to form an electron gun control cabinet.
        The electronic gun control cabinet contains high voltage, and each interlocking device of the cabinet door must be in normal operation before working. Connect to the machine ground.
        The evaporation source of the electron gun is installed on the bottom plate of the vacuum chamber, and must have a good grounding effect with the bottom plate. The installation of the evaporation source must be fixed with stainless steel screws, and there must be no magnetically conductive objects within 200mm of the surrounding area, otherwise it will affect the beam spot of the electron gun. Poor electronic performance. The electron gun baffle should be installed as far as possible at 30mm above the center of the crucible of the evaporation source, so as not to affect the emission of the electron beam.
        The electron gun evaporation source is a precision machined body, and it must have good cooling water during operation. For example, too high temperature will affect the forming of the electron beam and the performance of each sealing ring.
      
       (1) Electron gun head
        The installation of the gun head of the electron gun directly affects the normal operation of the work, and 90% of the failures are related to the gun head of the electron gun.
        After the electron gun tip has been used for a period of time, the formation and power of the electron beam will be affected by the contamination of the components, and it needs to be disassembled and cleaned.
      (2) Maintenance of the crucible

        Before dismantling the crucible, please turn off the water circuit and use compressed air to blow out the moisture in the electron gun cooling tube as much as possible.

        Evaporation source loading and unloading sequence:
        1. Remove the two cooling water connecting pipes. 2. Unscrew the two screws of the electron gun head to connect the high voltage line. 3. Remove the crucible drive connecting seat and coupling. 4. Unscrew the four fixing screws of the evaporation source. 5. Move the evaporation source to a stable and flat workbench. 6. Remove the four screws of the crucible cover, remove the cover and polish it clean. 7. Check whether the two sealing rings above the cover plate need to be replaced. 8. Turn the evaporation source upside down, and use a wooden board to cover the crucible part. 9. Unscrew the fixed crucible and turn the four screws. 10. Lift the evaporation source and remove the crucible. 11. Turn the crucible upside down, unscrew the eight screws of the bottom cover of the crucible, clean the dirt inside, and check whether the near sealing ring is needed. 12. Unscrew one screw of the water conduit 13. Unscrew the four screws connecting the crucible rotating mechanism and the crucible cover 14. Pull out the crucible rotating shaft and check whether the oil seal of the rotating shaft needs to be replaced. 15. Clean and install the crucible. The installation is performed in the reverse order above.
       (3) Maintenance of the magnetic guide plate and scanning ring of the optical pvd coating machine
        The magnetic guide plate and permanent magnet of the optical pvd coating machine do not need frequent disassembly and maintenance. If you need to disassemble, please pay attention to the pole direction of the permanent magnet and the direction of the magnetic guide plate. Due to the dense installation space of the coil, please do not use a hard-pointed object to pry it, otherwise it may cause damage.